Equilibrium defect density in hydrogenated amorphous germanium

1994 ◽  
Vol 65 (13) ◽  
pp. 1683-1685 ◽  
Author(s):  
B. Ebersberger ◽  
W. Krühler ◽  
W. Fuhs ◽  
H. Mell
2012 ◽  
Vol 1437 ◽  
Author(s):  
Mario Moreno ◽  
Alfonso Torres ◽  
Roberto Ambrosio ◽  
Pedro Rosales ◽  
Andrey Kosarev ◽  
...  

ABSTRACTWe report our main results on the development of un-cooled microbolometers based on hydrogenated amorphous Germanium-Silicon (a-GexSiy:H) thermo-sensing films deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD). Our research has been conducted to improve both, the structure of the devices (pixels) and the performance characteristics of the amorphous Germanium-Silicon thermosensing films.Our motivation is to produce microbolometers with much better performance characteristics (larger thermal coefficient of resistance, larger conductivity and better stability) than those available in commercial microbolometer arrays, based on boron doped hydrogenated amorphous silicon (a-Si:H,B).As part of our latest research, we also report the study of what we believe is the next generation of thermosensing films based on Silicon and Geranium amorphous films with embedded nanocrystals in the amorphous matrix (polymorphous films). Those materials have several advantages over amorphous, as a lower defect density, better stability and better transport properties.


1991 ◽  
Vol 44 (11) ◽  
pp. 5506-5509 ◽  
Author(s):  
C. Godet ◽  
Y. Bouizem ◽  
L. Chahed ◽  
I. El Zawawi ◽  
M. L. Thèye ◽  
...  

2000 ◽  
Vol 266-269 ◽  
pp. 726-729 ◽  
Author(s):  
I Chambouleyron ◽  
D Comedi ◽  
G Dalba ◽  
P Fornasini ◽  
R Grisenti ◽  
...  

1997 ◽  
Vol 467 ◽  
Author(s):  
Annette Diez ◽  
Twlo P. Drüsedau

ABSTRACTDeposition of amorphous germanium by anodic PCVD was performed changing the germane/hydrogen dilution ratio from 1/6 to 1/100. Films deposited under high dilution of germane are of a high mechanical density (92.5 % of bulk) and good optoelectronic properties (electrical conductivity at room temperature σ=10−5 (Ω cm)−1, majority carrier mobility-lifetime product at λ=1200 nm ημ=x 10−7 cm2/V). The quality of the films is increased by deposition at increasing pumping speed for hydrogen (lower hydrogen pressure) keeping the other parameters constant. It is suggested that fast atomic hydrogen originating from a backscattering process at the powered electrode bombard the growing film and contribute to the improved quality of the a-Ge:H. Also, the growth kinetics of the films is changed from linear to parabolic dependence on germane flow interchanging deposition from high to low hydrogen pressure. This effect is rationalized in terms of a contribution of energetic atomic hydrogen to the dissociation of germane.


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