Hard boron oxide thin‐film deposition using electron cyclotron resonance microwave plasmas

S. M. Gorbatkin; R. L. Rhoades; T. Y. Tsui; W. C. Oliver

doi:10.1063/1.112598

Hard boron oxide thin‐film deposition using electron cyclotron resonance microwave plasmas

Applied Physics Letters ◽

10.1063/1.112598 ◽

1994 ◽

Vol 65 (21) ◽

pp. 2672-2674 ◽

Cited By ~ 30

Author(s):

S. M. Gorbatkin ◽

R. L. Rhoades ◽

T. Y. Tsui ◽

W. C. Oliver

Keyword(s):

Thin Film ◽

Boron Oxide ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Oxide Thin Film ◽

Microwave Plasmas ◽

Resonance Microwave

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Boron nitride thin film deposition using electron cyclotron resonance microwave plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578514 ◽

1993 ◽

Vol 11 (4) ◽

pp. 1863-1869 ◽

Cited By ~ 1

Author(s):

S. M. Gorbatkin ◽

R. F. Burgie ◽

W. C. Oliver ◽

J. C. Barbour ◽

T. M. Mayer ◽

...

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Microwave Plasmas ◽

Resonance Microwave

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Boron nitride thin film deposition from solid borane ammonia using an electron cyclotron resonance microwave plasma source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579646 ◽

1995 ◽

Vol 13 (4) ◽

pp. 2018-2022 ◽

Cited By ~ 15

Author(s):

C. R. Eddy ◽

B. D. Sartwell

Keyword(s):

Thin Film ◽

Boron Nitride ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Plasma Source ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Resonance Microwave

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Electron cyclotron resonance microwave discharges for etching and thin‐film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575815 ◽

1989 ◽

Vol 7 (3) ◽

pp. 883-893 ◽

Cited By ~ 315

Author(s):

Jes Asmussen

Keyword(s):

Thin Film ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Microwave Discharges ◽

Resonance Microwave

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Silicon carbon alloy thin film depositions using electron cyclotron resonance microwave plasmas

10.1109/pvsc.1990.111873 ◽

2002 ◽

Author(s):

Y.H. Shing ◽

F.S. Pool

Keyword(s):

Thin Film ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Alloy Thin Film ◽

Microwave Plasmas ◽

Silicon Carbon ◽

Resonance Microwave

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Monte Carlo simulation and experimental study of an electron cyclotron resonance plasma for thin film deposition

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1997.604953 ◽

2002 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo ◽

S.C. Kuo

Keyword(s):

Thin Film ◽

Experimental Study ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Resonance Plasma

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Monte Carlo simulation and experimental study of an electron cyclotron resonance plasma for thin film deposition

IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1996.550637 ◽

2002 ◽

Author(s):

E. Koretzky ◽

S.P. Kuo ◽

S.C. Kuo

Keyword(s):

Thin Film ◽

Experimental Study ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Thin Film Deposition ◽

Electron Cyclotron ◽

Film Deposition ◽

Resonance Plasma

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Nanometer scale fabrication in mercury cadmium telluride using methane/hydrogen electron cyclotron resonance microwave plasmas

Applied Physics Letters ◽

10.1063/1.109390 ◽

1993 ◽

Vol 62 (19) ◽

pp. 2362-2364 ◽

Cited By ~ 17

Author(s):

C. R. Eddy ◽

E. A. Dobisz ◽

C. A. Hoffman ◽

J. R. Meyer

Keyword(s):

Cadmium Telluride ◽

Cyclotron Resonance ◽

Mercury Cadmium Telluride ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Nanometer Scale ◽

Microwave Plasmas ◽

Resonance Microwave

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7231. Deposition of diamond-like films by electron cyclotron resonance microwave plasmas

Vacuum ◽

10.1016/0042-207x(91)91038-p ◽

1991 ◽

Vol 42 (8-9) ◽

pp. 574

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Microwave Plasmas ◽

Resonance Microwave

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New approach to low temperature deposition of high-quality thin films by electron cyclotron resonance microwave plasmas

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586185 ◽

1992 ◽

Vol 10 (5) ◽

pp. 2170 ◽

Cited By ~ 7

Author(s):

T. T. Chau

Keyword(s):

Thin Films ◽

Low Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Microwave Plasmas ◽

High Quality ◽

New Approach ◽

Temperature Deposition ◽

Resonance Microwave

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Electron cyclotron resonance microwave ion sources for thin film processing

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(91)95114-s ◽

1991 ◽

Vol 56-57 ◽

pp. 1133-1137 ◽

Cited By ~ 5

Author(s):

L.A. Berry ◽

S.M. Gorbatkin

Keyword(s):

Thin Film ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Ion Sources ◽

Film Processing ◽

Resonance Microwave ◽

Thin Film Processing

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