Insituinvestigation of silicon surface cleaning and damage by argon electron cyclotron resonance plasmas

1994 ◽  
Vol 64 (10) ◽  
pp. 1233-1235 ◽  
Author(s):  
Y. Z. Hu ◽  
P. P. Buaud ◽  
Y. Wang ◽  
L. Spanos ◽  
E. A. Irene
Keyword(s):  
Cyclotron Resonance ◽  
Silicon Surface ◽  
Electron Cyclotron Resonance ◽  
Surface Cleaning ◽  
Electron Cyclotron

Surface Cleaning of AlGaAs Substrates by Hydrogen Electron Cyclotron Resonance (ECR) Plasma

1992 ◽  
Vol 31 (Part 2, No. 7B) ◽  
pp. L913-L915 ◽  
Author(s):  
Naoto Kondo ◽  
Yasushi Nanishi ◽  
Masatomo Fujimoto
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Surface Cleaning ◽  
Electron Cyclotron ◽  
Ecr Plasma

Damage Induced by Electron Cyclotron Resonance Plasma Etching on Silicon Surface

1991 ◽  
Vol 30 (Part 1, No. 5) ◽  
pp. 1045-1049 ◽  
Author(s):  
Gen Washidzu ◽  
Tohru Hara ◽  
Jun Hiyoshi ◽  
Masami Sasaki ◽  
Yasuhiro Suzuki ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Silicon Surface ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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