Role of excitation frequency in a low‐pressure, inductively coupled radio‐frequency, magnetized plasma

1993 ◽  
Vol 63 (17) ◽  
pp. 2330-2332 ◽  
Author(s):  
Chunshi Cui ◽  
R. W. Boswell
Keyword(s):  
Radio Frequency ◽  
Excitation Frequency ◽  
Low Pressure ◽  
Magnetized Plasma ◽  
Inductively Coupled

scholarly journals Formation of a Charged Layer in a Bounded Non-Uniform Magnetized Plasma in RF Field

2021 ◽  
Vol 57 (10) ◽  
Author(s):  
V.I. Zasenko
Keyword(s):  
Radio Frequency ◽  
Plasma Heating ◽  
Magnetized Plasma ◽  
Plasma Dynamics ◽  
Charged Layer ◽  
Ion Cyclotron ◽  
Faraday Shield

A model of plasma dynamics in the box of an ICRF (ion cyclotron radio-frequency) antenna without Faraday shield used for the plasma heating in tokamaks is proposed. Formation of a macroscopic layer of oscillating charge that plays a role of a shield is predicted. Relation to phenomena observed in a scrape-off layer plasma is discussed.

Diamond deposition from methanol–hydrogen–water mixed gas using a low pressure, radio frequency, inductively-coupled plasma

1998 ◽  
Vol 332 (1-2) ◽  
pp. 136-140 ◽  
Author(s):  
Mineo Hiramatsu ◽  
Hideyuki Noda ◽  
Hisao Nagai ◽  
Masao Shimakura ◽  
Masahito Nawata
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Mixed Gas ◽  
Diamond Deposition ◽  
Hydrogen Water ◽  
Inductively Coupled

Synthesis of diamond using a low pressure, radio frequency, inductively coupled plasma

1998 ◽  
Vol 16 (6) ◽  
pp. 3170-3174 ◽  
Author(s):  
Hideyuki Noda ◽  
Hisao Nagai ◽  
Masao Shimakura ◽  
Mineo Hiramatsu ◽  
Masahito Nawata
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Inductively Coupled

scholarly journals Nonlocal electron kinetics in a low‐pressure inductively coupled radio‐frequency discharge

1994 ◽  
Vol 65 (5) ◽  
pp. 537-539 ◽  
Author(s):  
V. I. Kolobov ◽  
D. F. Beale ◽  
L. J. Mahoney ◽  
A. E. Wendt
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Electron Kinetics ◽  
Inductively Coupled ◽  
Radio Frequency Discharge

Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma

1999 ◽  
Vol 75 (3) ◽  
pp. 328-330 ◽  
Author(s):  
S. A. Moshkalyov ◽  
P. G. Steen ◽  
S. Gomez ◽  
W. G. Graham
Keyword(s):  
Radio Frequency ◽  
Discharge Plasma ◽  
Low Pressure ◽  
Low Energy ◽  
Low Energy Electrons ◽  
Radio Frequency Discharge

Power Losses in RF Inductor of Ferrite-Free Closed-Loop Inductively-Coupled Low Pressure Mercury Lamps

2020 ◽  
pp. 89-94 ◽  
Author(s):  
Ekaterina V. Lovlya ◽  
Oleg A. Popov
Keyword(s):  
Closed Loop ◽  
Low Pressure ◽  
Mercury Vapour ◽  
Plasma Power ◽  
Power Losses ◽  
Inductive Discharge ◽  
Inductively Coupled ◽  
Radial Inhomogeneity ◽  
Transformer Model ◽  
Rf Inductor

RF inductor power losses of ferrite-free electrode-less low pressure mercury inductively-coupled discharges excited in closed-loop dielectric tube were studied. The modelling was made within the framework of low pressure inductive discharge transformer model for discharge lamps with tubes of 16, 25 and 38 mm inner diam. filled with the mixture of mercury vapour (7.5×10–3 mm Hg) and argon (0.1, 0.3 and 1.0 mm Hg) at RF frequencies of 1, 7; 3.4 and 5.1 MHz and plasma power of (25–500) W. Discharges were excited with the help of the induction coil of 3, 4 and 6 turns placed along the inner perimeter of the closed-loop tube. It was found that the dependence of coil power losses, Pcoil, on the discharge plasma power, Ppl, had the minimum while Pcoil decreased with RF frequency, tube diameter and coil number of turns. The modelling results were found in good qualitative agreement with the experimental data; quantitative discrepancies are believed to be due skin-effect and RF electric field radial inhomogeneity that were not included in discharge modelling.

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