Electrical properties of strontium titanate thin films by multi‐ion‐beam reactive sputtering technique

1993 ◽  
Vol 63 (8) ◽  
pp. 1038-1040 ◽  
Author(s):  
C.‐J. Peng ◽  
H. Hu ◽  
S. B. Krupanidhi
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Strontium Titanate ◽  
Ion Beam ◽  
Reactive Sputtering

Effect of Deposition Parameters on the Microstructural Evolution and Electrical Properties of Charge-Balanced Barium Strontium Titanate Ferroelectric Thin Films Deposited on Ceramic Substrates by Pulsed Laser Deposition

2003 ◽  
Vol 784 ◽  
Author(s):  
Costas G. Fountzoulas ◽  
Steven C. Tidrow ◽  
Michael Hatzistergos ◽  
Harry Efstathiadis
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Pulsed Laser Deposition ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Ion Beam ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Microwave Antenna ◽  
Barium Strontium

ABSTRACTBarium strontium titanate (Ba0.60Sr0.40TiO3) thin films are the main materials of interest in tunable phase shifter for microwave antenna applications. Ba0.60Sr0.40Y0.05Ta0.05Ti0.90O3 thin films, of nominal thickness ranging from 1.7 μm to 2.3 μm, were synthesized on MgO (100) substrates, at substrate temperatures ranging from 500°C to 900°C, at oxygen partial pressures 20 and 50 mTorr, at 500 mJ energy fluence on 3 mm x 1 mm spot size and 10 pulses per second using the pulsed laser deposition technique. All film synthesized at temperatures greater than 500°C were crystalline. The effect of the ionic substitution and substrate temperature in conjunction with the effect of the oxygen partial pressure on the microstructure, and mechanical and electrical properties of the thin films have been studied using shallow angle x-ray diffraction, SEM, nanoindentation, atomic force microscopy (AFM), and focused ion beam analysis (FIB) and are reported in detail. We are currently in the process of measuring the capacitance of these films by various methods.

Substrate bias effects during R-F sputtering of Y-Ba-Cu-O films

1990 ◽  
Vol 5 (4) ◽  
pp. 677-679 ◽  
Author(s):  
A. J. Drehman ◽  
M. W. Dumais
Keyword(s):  
Thin Films ◽  
Strontium Titanate ◽  
Reactive Sputtering ◽  
Negative Bias ◽  
Superconducting Thin Films ◽  
Substrate Bias ◽  
Composition Control ◽  
Zero Resistance

Y-Ba-Cu-O films were made by R-F diode sputtering using a single oxide target. It was found that if a small negative bias is applied to the substrate, the etching associated with reactive sputtering is significantly reduced. This results in better composition control and uniformity, which are quite important for the formation of superconducting thin films. Films deposited on strontium titanate, when annealed in oxygen, become superconducting with zero resistance at 89 K.

Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition

2005 ◽  
Vol 492 (1-2) ◽  
pp. 203-206 ◽  
Author(s):  
Zhi Yan ◽  
Zhi Tang Song ◽  
Wei Li Liu ◽  
Qing Wan ◽  
Fu Min Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electrical Properties ◽  
Ion Beam ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Ion Beam Assisted Deposition ◽  
P Type

Peculiarities of nucleation of PbOx thin films during ion-beam reactive sputtering

1996 ◽  
Vol 153 (2) ◽  
pp. K1-K4
Author(s):  
E. V. Sviridov ◽  
D. Q. Xiao ◽  
W. B. Pezg ◽  
Z. Shi ◽  
J. G. Zhu
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Reactive Sputtering

Microstructure and electrical properties of Mn-doped barium strontium titanate thin films prepared on copper foils

2010 ◽  
Vol 256 (22) ◽  
pp. 6531-6535 ◽  
Author(s):  
Yanhua Fan ◽  
Shuhui Yu ◽  
Rong Sun ◽  
Lei Li ◽  
Yansheng Yin ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Copper Foils ◽  
Barium Strontium ◽  
Mn Doped
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