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Cubic boron nitride films synthesized by low‐energy ion‐beam‐enhanced vapor deposition
Applied Physics Letters
◽
10.1063/1.107798
◽
1992
◽
Vol 61
(7)
◽
pp. 786-788
◽
Cited By ~ 40
Author(s):
Tsutomu Ikeda
Keyword(s):
Boron Nitride
◽
Vapor Deposition
◽
Ion Beam
◽
Cubic Boron Nitride
◽
Low Energy
◽
Boron Nitride Films
Download Full-text
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References
A Comparison of the Effects of RF Plasma Discharge and Ion Beam Supply on the Growth of Cubic Boron Nitride Films Formed by Laser Physical Vapor Deposition
Japanese Journal of Applied Physics
◽
10.1143/jjap.33.266
◽
1994
◽
Vol 33
(Part 1, No.1A)
◽
pp. 266-269
◽
Cited By ~ 6
Author(s):
Kayo Kaneda
◽
Kimihiro Shibata
Keyword(s):
Boron Nitride
◽
Vapor Deposition
◽
Physical Vapor Deposition
◽
Ion Beam
◽
Cubic Boron Nitride
◽
Plasma Discharge
◽
Rf Plasma
◽
Rf Plasma Discharge
◽
Boron Nitride Films
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Cubic boron nitride films grown by low energy B+ and N+ ion beam deposition
Applied Physics Letters
◽
10.1063/1.115487
◽
1995
◽
Vol 67
(1)
◽
pp. 46-48
◽
Cited By ~ 84
Author(s):
H. Hofsäss
◽
C. Ronning
◽
U. Griesmeier
◽
M. Gross
◽
S. Reinke
◽
...
Keyword(s):
Boron Nitride
◽
Ion Beam
◽
Cubic Boron Nitride
◽
Low Energy
◽
Ion Beam Deposition
◽
Boron Nitride Films
◽
Beam Deposition
Download Full-text
Fundamental research on the deposition of cubic boron nitride films on curved substrates by ion-beam-assisted vapor deposition
Thin Solid Films
◽
10.1016/0040-6090(93)90572-7
◽
1993
◽
Vol 228
(1-2)
◽
pp. 97-99
◽
Cited By ~ 17
Author(s):
M. Sueda
◽
T. Kobayashi
◽
H. Tsukamoto
◽
T. Rokkaku
◽
S. Morimoto
◽
...
Keyword(s):
Boron Nitride
◽
Vapor Deposition
◽
Ion Beam
◽
Cubic Boron Nitride
◽
Fundamental Research
◽
Boron Nitride Films
Download Full-text
Low energy kinetic threshold in the growth of cubic boron nitride films
Applied Physics Letters
◽
10.1063/1.111779
◽
1994
◽
Vol 64
(14)
◽
pp. 1859-1861
◽
Cited By ~ 54
Author(s):
S. Kidner
◽
C. A. Taylor
◽
Roy Clarke
Keyword(s):
Boron Nitride
◽
Cubic Boron Nitride
◽
Low Energy
◽
Boron Nitride Films
Download Full-text
Hardness and Young’s modulus of high-quality cubic boron nitride films grown by chemical vapor deposition
Journal of Applied Physics
◽
10.1063/1.1534625
◽
2003
◽
Vol 93
(3)
◽
pp. 1515-1519
◽
Cited By ~ 37
Author(s):
X. Jiang
◽
J. Philip
◽
W. J. Zhang
◽
P. Hess
◽
S. Matsumoto
Keyword(s):
Chemical Vapor Deposition
◽
Boron Nitride
◽
Young’S Modulus
◽
Vapor Deposition
◽
Young's Modulus
◽
Cubic Boron Nitride
◽
Chemical Vapor
◽
High Quality
◽
Boron Nitride Films
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High-quality, faceted cubic boron nitride films grown by chemical vapor deposition
Applied Physics Letters
◽
10.1063/1.1428762
◽
2001
◽
Vol 79
(27)
◽
pp. 4530-4532
◽
Cited By ~ 32
Author(s):
W. J. Zhang
◽
X. Jiang
◽
S. Matsumoto
Keyword(s):
Chemical Vapor Deposition
◽
Boron Nitride
◽
Vapor Deposition
◽
Cubic Boron Nitride
◽
Chemical Vapor
◽
High Quality
◽
Boron Nitride Films
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Thermal Stability of Cubic Boron Nitride Films Deposited by Chemical Vapor Deposition.
ChemInform
◽
10.1002/chin.200702009
◽
2007
◽
Vol 38
(2)
◽
Author(s):
J. Yu
◽
Z. Zheng
◽
H. C. Ong
◽
K. Y. Wong
◽
S. Matsumoto
◽
...
Keyword(s):
Thermal Stability
◽
Chemical Vapor Deposition
◽
Boron Nitride
◽
Vapor Deposition
◽
Cubic Boron Nitride
◽
Chemical Vapor
◽
Boron Nitride Films
◽
Thermal Stability Of
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Method for Simulating the Thickness Distribution of a Cubic Boron Nitride Film Deposited on a Curved Substrate using Ion-beam-assisted Vapor Deposition
Physics Procedia
◽
10.1016/j.phpro.2012.03.643
◽
2012
◽
Vol 32
◽
pp. 831-839
◽
Cited By ~ 1
Author(s):
T. Kobayashi
◽
R. Valizadeh
◽
J.S. Colligon
◽
H. Kanematsu
◽
K. Morisato
Keyword(s):
Boron Nitride
◽
Vapor Deposition
◽
Ion Beam
◽
Thickness Distribution
◽
Cubic Boron Nitride
◽
Nitride Film
◽
Curved Substrate
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The effect of adding gas ions to a beam for deposition of boron nitride films by the ion beam and vapor deposition method
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/0168-583x(91)95222-y
◽
1991
◽
Vol 59-60
◽
pp. 276-279
◽
Cited By ~ 8
Author(s):
Andoh Yasunori
◽
Nishiyama Satoshi
◽
Kirimura Hiroya
◽
Mikami Takashi
◽
Ogata Kiyoshi
◽
...
Keyword(s):
Boron Nitride
◽
Vapor Deposition
◽
Ion Beam
◽
Deposition Method
◽
Boron Nitride Films
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Role of Low-Energy Ion Impact in Plasma Deposition of Cubic Boron Nitride Films
ECS Meeting Abstracts
◽
10.1149/ma2016-02/17/1519
◽
2016
◽
Keyword(s):
Boron Nitride
◽
Plasma Deposition
◽
Cubic Boron Nitride
◽
Low Energy
◽
Ion Impact
◽
Boron Nitride Films
Download Full-text
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