Post‐growth annealing of low temperature‐grown Sb‐doped Si molecular beam epitaxial films

1992 ◽  
Vol 61 (1) ◽  
pp. 76-78 ◽  
Author(s):  
K. D. Hobart ◽  
D. J. Godbey ◽  
P. E. Thompson
1992 ◽  
Vol 61 (13) ◽  
pp. 1585-1587 ◽  
Author(s):  
H. Shen ◽  
F. C. Rong ◽  
R. Lux ◽  
J. Pamulapati ◽  
M. Taysing‐Lara ◽  
...  

1997 ◽  
Vol 70 (3) ◽  
pp. 369-371 ◽  
Author(s):  
W. M. Chen ◽  
I. A. Buyanova ◽  
W.-X. Ni ◽  
G. V. Hansson ◽  
B. Monemar

1975 ◽  
Vol 14 (4) ◽  
pp. 581-582 ◽  
Author(s):  
Mitsuru Naganuma ◽  
Kiichi Kamimura ◽  
Kiyoshi Takahashi ◽  
Yoshio Sakai

1988 ◽  
Vol 141 ◽  
Author(s):  
B. J. Garrison ◽  
M. T. Miller ◽  
D.W. Brenner

Summary:Molecular dynamics simulations have been performed that examine the microscopic mechanisms of rearrangements of atoms on the Si{ 1001 surface due to deposition of gas phase atoms. For thermal energy deposition we find that the gas atoms initially attach to dangling bonds of the surface dimer atoms. The dimer ’unreconstruction’ is due to a diffusion event on the surface, thus is temperature activated. We also find that dimers may open in regions of the surface where there are several atoms not at lattice sites, thus a low temperature amorphous structure. For 5-10 eV deposition there are direct mechanisms of dimer opening that occur on the 50-100 fs timescale. For energies greater than 15-20 eV there is implantation of the silicon atoms which leads to subsurface damage.


1998 ◽  
Vol 73 (10) ◽  
pp. 1376-1378 ◽  
Author(s):  
Biao Li ◽  
Yan Wu ◽  
Yongsheng Gui ◽  
Hongjuan Ye ◽  
Yong Chang ◽  
...  

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