Characterization of epitaxial layers by the depth dependence of boron diffusivity
2004 ◽
Vol 22
(3)
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pp. 908
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1998 ◽
Vol 189-190
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pp. 435-438
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1991 ◽
pp. 1-8
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1984 ◽
Vol 131
(8)
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pp. 1923-1926
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2013 ◽
Vol 60
(8)
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pp. 2592-2597
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2019 ◽
Vol 34
(5)
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pp. 848-853
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1996 ◽
Vol 11
(6)
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pp. 952-958
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