Sub‐30 nm lithography in a negative electron beam resist with a vacuum scanning tunneling microscope

1991 ◽  
Vol 58 (22) ◽  
pp. 2526-2528 ◽  
Author(s):  
E. A. Dobisz ◽  
C. R. K. Marrian
Keyword(s):  
Electron Beam ◽  
Scanning Tunneling Microscope ◽  
Scanning Tunneling ◽  
Tunneling Microscope

Low voltage electron beam lithography in self‐assembled ultrathin films with the scanning tunneling microscope

1994 ◽  
Vol 64 (3) ◽  
pp. 390-392 ◽  
Author(s):  
C. R. K. Marrian ◽  
F. K. Perkins ◽  
S. L. Brandow ◽  
T. S. Koloski ◽  
E. A. Dobisz ◽  
...  
Keyword(s):  
Electron Beam ◽  
Ultrathin Films ◽  
Electron Beam Lithography ◽  
Scanning Tunneling Microscope ◽  
Low Voltage ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Voltage Electron ◽  
Self Assembled

Fabrication of electron-beam microcolumn aligned by scanning tunneling microscope

1997 ◽  
Vol 15 (3) ◽  
pp. 1499-1502 ◽  
Author(s):  
Jeong-Young Park ◽  
Ho-Jin Choi ◽  
Y. Lee ◽  
S. Kang ◽  
K. Chun ◽  
...  
Keyword(s):  
Electron Beam ◽  
Scanning Tunneling Microscope ◽  
Scanning Tunneling ◽  
Tunneling Microscope
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