Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere

H. Brückl; J. Kretz; H. W. Koops; G. Reiss

doi:10.1116/1.590759

Low energy electron beam decomposition of metalorganic precursors with a scanning tunneling microscope at ambient atmosphere

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590759 ◽

1999 ◽

Vol 17 (4) ◽

pp. 1350 ◽

Cited By ~ 11

Author(s):

H. Brückl ◽

J. Kretz ◽

H. W. Koops ◽

G. Reiss

Keyword(s):

Electron Beam ◽

Scanning Tunneling Microscope ◽

Low Energy ◽

Energy Electron ◽

Scanning Tunneling ◽

Ambient Atmosphere ◽

Tunneling Microscope ◽

Low Energy Electron

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Experimental Measurement of the Intensity Profiles of a Low-energy Electron Beam Extracted from a Scanning Tunneling Microscope Tip by Field Emission

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.6172 ◽

1999 ◽

Vol 38 (Part 1, No. 10) ◽

pp. 6172-6173 ◽

Cited By ~ 2

Author(s):

Ippei Kawamoto ◽

Nan Li ◽

Tatsuo Yoshinobu ◽

Hiroshi Iwasaki

Keyword(s):

Electron Beam ◽

Field Emission ◽

Experimental Measurement ◽

Scanning Tunneling Microscope ◽

Low Energy ◽

Energy Electron ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Low Energy Electron

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Low Energy Electron Beam Stimulated Surface Reaction: Selective Etching of SiO 2/Si Using Scanning Tunneling Microscope

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.l995 ◽

1998 ◽

Vol 37 (Part 2, No. 8B) ◽

pp. L995-L998 ◽

Cited By ~ 17

Author(s):

Nan Li ◽

Tatsuo Yoshinobu ◽

Hiroshi Iwasaki

Keyword(s):

Electron Beam ◽

Scanning Tunneling Microscope ◽

Surface Reaction ◽

Selective Etching ◽

Low Energy ◽

Energy Electron ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Low Energy Electron

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An Observation of Benzotriazole (BTA) Adsorption on Cu(110) by the Ultra High Vacuum (UHV)-Scanning Tunneling Microscope (STM) and Low Energy Electron Difiraction (LEED)

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.l125 ◽

1994 ◽

Vol 33 (Part 2, No. 1B) ◽

pp. L125-L128 ◽

Cited By ~ 18

Author(s):

Kyehyun Cho ◽

Jiro Kishimoto ◽

Tomihiro Hashizume ◽

Toshio Sakurai

Keyword(s):

Scanning Tunneling Microscope ◽

High Vacuum ◽

Low Energy ◽

Energy Electron ◽

Ultra High Vacuum ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Low Energy Electron

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Low Energy Electron Diffraction and Scanning Tunneling Microscope Observation of Ba Induced Step Arrangement of Vicinal Si(111) Surface.

Shinku ◽

10.3131/jvsj.45.277 ◽

2002 ◽

Vol 45 (3) ◽

pp. 277-280

Author(s):

Masaaki AONO ◽

Yujiro FUKUI ◽

Toshio URANO ◽

Kaoru OJIMA ◽

Masamichi YOSHIMURA

Keyword(s):

Electron Diffraction ◽

Scanning Tunneling Microscope ◽

Low Energy ◽

Energy Electron ◽

Microscope Observation ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Low Energy Electron Diffraction ◽

Low Energy Electron

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Low Energy Electron Stimulated Etching of Thin Si-Oxide Layer in Nanometer Scale Using Scanning Tunneling Microscope

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.l252 ◽

1999 ◽

Vol 38 (Part 2, No. 3A) ◽

pp. L252-L254 ◽

Cited By ~ 5

Author(s):

Nan Li ◽

Tatsuo Yoshinobu ◽

Hiroshi Iwasaki

Keyword(s):

Oxide Layer ◽

Scanning Tunneling Microscope ◽

Low Energy ◽

Energy Electron ◽

Scanning Tunneling ◽

Nanometer Scale ◽

Tunneling Microscope ◽

Low Energy Electron

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Development of an advanced low-energy electron diffraction technique using field-emitted electrons from scanning tunneling microscope tips

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1401751 ◽

2001 ◽

Vol 19 (5) ◽

pp. 1874 ◽

Cited By ~ 8

Author(s):

Seigi Mizuno

Keyword(s):

Electron Diffraction ◽

Scanning Tunneling Microscope ◽

Low Energy ◽

Energy Electron ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Low Energy Electron Diffraction ◽

Electron Diffraction Technique ◽

Low Energy Electron

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Nanofabrication on Si oxide with scanning tunneling microscope: Mechanism of the low-energy electron-stimulated reaction

Applied Physics Letters ◽

10.1063/1.123636 ◽

1999 ◽

Vol 74 (11) ◽

pp. 1621-1623 ◽

Cited By ~ 14

Author(s):

Nan Li ◽

Tatsuo Yoshinobu ◽

Hiroshi Iwasaki

Keyword(s):

Scanning Tunneling Microscope ◽

Low Energy ◽

Energy Electron ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Low Energy Electron

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Growth of GaN on sapphire via low-temperature deposited buffer layer and realization of p-type GaN by Mg doping followed by low-energy electron beam irradiation

Uspekhi Fizicheskih Nauk ◽

10.3367/ufnr.2014.12.037745 ◽

2016 ◽

Vol 186 (5) ◽

pp. 518-523

Author(s):

Hiroshi Amano

Keyword(s):

Electron Beam ◽

Low Temperature ◽

Buffer Layer ◽

Electron Beam Irradiation ◽

Low Energy ◽

Energy Electron ◽

Beam Irradiation ◽

Mg Doping ◽

Low Energy Electron ◽

P Type

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Low Energy Electron Beam Induced Charging and Secondary Electron Emission Properties of FEP Film Used on Satellite Surfaces

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.132.790 ◽

2012 ◽

Vol 132 (9) ◽

pp. 790-796 ◽

Cited By ~ 1

Author(s):

Haruhisa Fujii ◽

Teppei Okumura ◽

Masato Takahashi

Keyword(s):

Electron Beam ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Low Energy ◽

Energy Electron ◽

Emission Properties ◽

Low Energy Electron

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EQUIPMENT FOR PULSED THERMAL TREATMENT OF THE SURFACES OF MATERIALS BY A LOW-ENERGY ELECTRON BEAM

High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) ◽

10.1615/hightempmatproc.2015013827 ◽

2013 ◽

Vol 17 (2-3) ◽

pp. 187-194 ◽

Cited By ~ 1

Author(s):

Vladimir N. Devyatkov ◽

Nikolay N. Koval ◽

S. V. Grigoriev ◽

A. D. Teresov

Keyword(s):

Electron Beam ◽

Thermal Treatment ◽

Low Energy ◽

Energy Electron ◽

Low Energy Electron

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