Ejection angle dependence of electrical properties of ion beam sputtered tantalum oxide films

Kengo Ishiyama; Yasunori Taga

doi:10.1063/1.104592

Ejection angle dependence of electrical properties of ion beam sputtered tantalum oxide films

Applied Physics Letters ◽

10.1063/1.104592 ◽

1991 ◽

Vol 58 (6) ◽

pp. 577-579 ◽

Cited By ~ 5

Author(s):

Kengo Ishiyama ◽

Yasunori Taga

Keyword(s):

Electrical Properties ◽

Ion Beam ◽

Tantalum Oxide ◽

Oxide Films ◽

Angle Dependence ◽

Ejection Angle

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Ion beam and dual ion beam sputter deposition of tantalum oxide films

10.1117/12.192101 ◽

1994 ◽

Author(s):

Mirza Cevro ◽

George Carter

Keyword(s):

Ion Beam ◽

Tantalum Oxide ◽

Oxide Films ◽

Sputter Deposition ◽

Ion Beam Sputter Deposition

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Structural and electrical properties of radio frequency magnetron sputtered tantalum oxide films: Influence of post-deposition annealing

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2010.08.002 ◽

2010 ◽

Vol 13 (4) ◽

pp. 245-251 ◽

Cited By ~ 13

Author(s):

S.V. Jagadeesh Chandra ◽

Chel-Jong Choi ◽

S. Uthanna ◽

G. Mohan Rao

Keyword(s):

Electrical Properties ◽

Radio Frequency ◽

Tantalum Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Post Deposition Annealing ◽

Structural And Electrical Properties ◽

Post Deposition

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Optical and electrical properties of thermal Tantalum oxide films on silicon

IEEE Transactions on Electron Devices ◽

10.1109/t-ed.1981.20277 ◽

1981 ◽

Vol 28 (1) ◽

pp. 22-27 ◽

Cited By ~ 32

Author(s):

D.J. Smith ◽

L. Young

Keyword(s):

Electrical Properties ◽

Tantalum Oxide ◽

Oxide Films ◽

Optical And Electrical Properties

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Effect of substrate temperature on the structural, optical and electrical properties of dc magnetron sputtered tantalum oxide films

Applied Surface Science ◽

10.1016/j.apsusc.2007.08.005 ◽

2008 ◽

Vol 254 (7) ◽

pp. 1953-1960 ◽

Cited By ~ 53

Author(s):

S.V. Jagadeesh Chandra ◽

S. Uthanna ◽

G. Mohan Rao

Keyword(s):

Electrical Properties ◽

Substrate Temperature ◽

Tantalum Oxide ◽

Oxide Films ◽

Optical And Electrical Properties

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Effects of additive elements on electrical properties of tantalum oxide films

Journal of Applied Physics ◽

10.1063/1.356227 ◽

1994 ◽

Vol 75 (5) ◽

pp. 2538-2544 ◽

Cited By ~ 66

Author(s):

Hisayoshi Fujikawa ◽

Yasunori Taga

Keyword(s):

Electrical Properties ◽

Tantalum Oxide ◽

Oxide Films

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Influence of assistant ion beam on the opto-electrical properties of molybdenum doped zinc oxide films deposited on polyethersulfone via dual ion beam sputtering

Vacuum ◽

10.1016/j.vacuum.2011.01.018 ◽

2011 ◽

Vol 85 (10) ◽

pp. 961-967 ◽

Cited By ~ 9

Author(s):

Chin-Chiuan Kuo ◽

Chi-Chang Liu ◽

Shao-Chih He ◽

Jing-Tang Chang ◽

Ju-Liang He

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Ion Beam ◽

Oxide Films ◽

Ion Beam Sputtering ◽

Zinc Oxide Films ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Microanalyses of Tantalum Oxide Films on Si Substrate Deposited by Dynamic Ion Beam Mixing

phys stat sol (a) ◽

10.1002/pssa.2211470240 ◽

1995 ◽

Vol 147 (2) ◽

pp. K83-K85

Author(s):

N. K. Huang ◽

D. Z. Wang

Keyword(s):

Ion Beam ◽

Tantalum Oxide ◽

Oxide Films ◽

Si Substrate ◽

Ion Beam Mixing

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Effects of oxygen content on the optical properties of tantalum oxide films deposited by ion-beam sputtering

Applied Optics ◽

10.1364/ao.24.000490 ◽

1985 ◽

Vol 24 (4) ◽

pp. 490 ◽

Cited By ~ 127

Author(s):

H. Demiryont ◽

James R. Sites ◽

Kent Geib

Keyword(s):

Optical Properties ◽

Oxygen Content ◽

Ion Beam ◽

Tantalum Oxide ◽

Oxide Films ◽

Ion Beam Sputtering ◽

Beam Sputtering

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Ion-beam and dual-ion-beam sputter deposition of tantalum oxide films

Optical Engineering ◽

10.1117/12.188616 ◽

1995 ◽

Vol 34 (2) ◽

pp. 596 ◽

Cited By ~ 32

Author(s):

Mirza Cevro

Keyword(s):

Ion Beam ◽

Tantalum Oxide ◽

Oxide Films ◽

Sputter Deposition ◽

Ion Beam Sputter Deposition

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Structural and electrical properties of tantalum oxide films grown by photo-assisted pulsed laser deposition

Applied Surface Science ◽

10.1016/s0169-4332(01)00752-8 ◽

2002 ◽

Vol 186 (1-4) ◽

pp. 40-44 ◽

Cited By ~ 17

Author(s):

Jun-Ying Zhang ◽

Ian W Boyd

Keyword(s):

Electrical Properties ◽

Pulsed Laser Deposition ◽

Tantalum Oxide ◽

Oxide Films ◽

Pulsed Laser ◽

Laser Deposition ◽

Structural And Electrical Properties

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