Epitaxial growth of diamond thin films on cubic boron nitride {111} surfaces by dc plasma chemical vapor deposition

S. Koizumi; T. Murakami; T. Inuzuka; K. Suzuki

doi:10.1063/1.103647

Epitaxial growth of diamond thin films on cubic boron nitride {111} surfaces by dc plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.103647 ◽

1990 ◽

Vol 57 (6) ◽

pp. 563-565 ◽

Cited By ~ 183

Author(s):

S. Koizumi ◽

T. Murakami ◽

T. Inuzuka ◽

K. Suzuki

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Boron Nitride ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Plasma Chemical ◽

Dc Plasma ◽

Plasma Chemical Vapor Deposition

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Orientation influence of cubic boron nitride crystal facets on the epitaxial growth of diamond film by microwave plasma chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(94)90160-0 ◽

1994 ◽

Vol 135 (3-4) ◽

pp. 639-642 ◽

Cited By ~ 3

Author(s):

W.P. Chai ◽

Y.S. Gu ◽

M. Li ◽

Z.H. Mai ◽

Q.Z. Li ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Epitaxial Growth ◽

Diamond Film ◽

Vapor Deposition ◽

Microwave Plasma ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Cubic boron nitride thin film synthesis on silica substrates by low-pressure inductively-coupled r.f. plasma chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(99)00540-4 ◽

1999 ◽

Vol 354 (1-2) ◽

pp. 24-28 ◽

Cited By ~ 6

Author(s):

K.K. Chattopadhyay ◽

S. Matsumoto ◽

Y.-F. Zhang ◽

I. Sakaguchi ◽

M. Nishitani-Gamo ◽

...

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Inductively Coupled ◽

Film Synthesis

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Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition

Materials Letters ◽

10.1016/s0167-577x(02)01007-8 ◽

2003 ◽

Vol 57 (8) ◽

pp. 1459-1463 ◽

Cited By ~ 1

Author(s):

K.K. Chattopadhyay ◽

A.N. Banerjee ◽

S. Kundoo

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Inductively Coupled ◽

Frequency Plasma

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Formation and Properties of Cubic Boron Nitride Films on Tungsten Carbide by Plasma Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.3455 ◽

1992 ◽

Vol 31 (Part 1, No. 10) ◽

pp. 3455-3460 ◽

Cited By ~ 25

Author(s):

Masaki Okamoato ◽

Yoshiharu Utsumi ◽

Yukio Osaka

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Tungsten Carbide ◽

Vapor Deposition ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Nitride Films

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Synthesis of thick and high quality cubic boron nitride films by r.f. bias assisted d.c. jet plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2004.02.010 ◽

2004 ◽

Vol 13 (9) ◽

pp. 1704-1708 ◽

Cited By ~ 18

Author(s):

J Yu ◽

S Matsumoto

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Plasma Chemical ◽

High Quality ◽

Plasma Chemical Vapor Deposition ◽

Jet Plasma ◽

Boron Nitride Films

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Growth of Diamond Thin Films by dc Plasma Chemical Vapor Deposition and Characteristics of the Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.29.153 ◽

1990 ◽

Vol 29 (Part 1, No. 1) ◽

pp. 153-157 ◽

Cited By ~ 71

Author(s):

Kazuhiro Suzuki ◽

Atsuhito Sawabe ◽

Tadao Inuzuka

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Plasma Chemical ◽

Dc Plasma ◽

Plasma Chemical Vapor Deposition ◽

Diamond Thin Films

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Temperature effects on growth of boron nitride thin films by a hot filament assisted rf plasma chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(97)01017-1 ◽

1998 ◽

Vol 322 (1-2) ◽

pp. 37-40 ◽

Cited By ~ 8

Author(s):

Xiying Ma ◽

Jinman Yang ◽

Deyan He ◽

Guanghua Chen

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Temperature Effects ◽

Chemical Vapor ◽

Rf Plasma ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Hot Filament

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Growth of diamond thin films by dc plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.98080 ◽

1987 ◽

Vol 50 (12) ◽

pp. 728-729 ◽

Cited By ~ 221

Author(s):

Kazuhiro Suzuki ◽

Atsuhito Sawabe ◽

Hiroaki Yasuda ◽

Tadao Inuzuka

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Plasma Chemical ◽

Dc Plasma ◽

Plasma Chemical Vapor Deposition ◽

Diamond Thin Films

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Effects of a Negative Self-Bias on the Growth of Cubic Boron Nitride Prepared by Plasma Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.30.344 ◽

1991 ◽

Vol 30 (Part 1, No. 2) ◽

pp. 344-348 ◽

Cited By ~ 40

Author(s):

Haruki Yokoyama ◽

Masaki Okamoto ◽

Yukio Osaka

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Self Bias

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Boron nitride thin films by microwave ECR plasma chemical vapor deposition

Thin Solid Films ◽

10.1016/0040-6090(93)90238-k ◽

1993 ◽

Vol 235 (1-2) ◽

pp. 30-34 ◽

Cited By ~ 7

Author(s):

M.J. Paisley ◽

L.P. Bourget ◽

R.F. Davis

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Ecr Plasma

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