Heavy carbon doping in metalorganic chemical vapor deposition for GaAs using a low V/III ratio

1990 ◽  
Vol 56 (13) ◽  
pp. 1248-1250 ◽  
Author(s):  
Mitsuhiro Kushibe ◽  
Kazuhiro Eguchi ◽  
Masahisa Funamizu ◽  
Yasuo Ohba
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Doping ◽  
Heavy Carbon ◽  
Metalorganic Chemical

Heavy carbon doping of metalorganic chemical vapor deposition grown GaAs using carbon tetrachloride

1989 ◽  
Vol 54 (19) ◽  
pp. 1905-1907 ◽  
Author(s):  
B. T. Cunningham ◽  
M. A. Haase ◽  
M. J. McCollum ◽  
J. E. Baker ◽  
G. E. Stillman
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Tetrachloride ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Doping ◽  
Heavy Carbon ◽  
Metalorganic Chemical
Sign in / Sign up

Export Citation Format

Share Document