Simulation of the large-area growth of homoepitaxial 4H-Sic by chemical vapor deposition
2001 ◽
Vol 11
(PR3)
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pp. Pr3-1079-Pr3-1086
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2002 ◽
Vol 389-393
◽
pp. 223-226
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2014 ◽
Vol 32
(1)
◽
pp. 011210
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