3D micro-fabrication processes: a review

2006 ◽  
Author(s):  
C. Stokes ◽  
P.J. Palmer
Keyword(s):  
Micro Fabrication

New type electron gun with electrostatic and electromagnetic lenses

1978 ◽  
Vol 36 (1) ◽  
pp. 62-63
Author(s):  
T. Ichinokawa ◽  
H. Maeda
Keyword(s):  
Electron Microscopy ◽  
Electron Beam ◽  
Optimum Condition ◽  
Bias Voltage ◽  
Electron Gun ◽  
Charge Effect ◽  
Micro Fabrication ◽  
Maximum Brightness ◽  
New Type ◽  
The Ideal

I. IntroductionThermionic electron gun with the Wehnelt grid is popularly used in the electron microscopy and electron beam micro-fabrication. It is well known that this gun could get the ideal brightness caluculated from the Lengumier and Richardson equations under the optimum condition. However, the design and ajustment to the optimum condition is not so easy. The gun has following properties with respect to the Wehnelt bias; (1) The maximum brightness is got only in the optimum bias. (2) In the larger bias than the optimum, the brightness decreases with increasing the bias voltage on account of the space charge effect. (3) In the smaller bias than the optimum, the brightness decreases with bias voltage on account of spreading of the cross over spot due to the aberrations of the electrostatic immersion lens.In the present experiment, a new type electron gun with the electrostatic and electromagnetic lens is designed, and its properties are examined experimentally.

scholarly journals A Stochastic Model to Describe the Scattering in the Response of Polysilicon MEMS

2021 ◽  
Vol 2 (1) ◽  
pp. 95
Author(s):  
Luca Dassi ◽  
Marco Merola ◽  
Eleonora Riva ◽  
Angelo Santalucia ◽  
Andrea Venturelli ◽  
...  
Keyword(s):  
Silicon Film ◽  
Micro Fabrication ◽  
Micro Electro Mechanical Systems ◽  
Local Fluctuations ◽  
Stochastic Framework ◽  
On Line ◽  
Chip Testing ◽  
On Chip ◽  
Time Required ◽  
Polycrystalline Silicon Film

The current miniaturization trend in the market of inertial microsystems is leading to movable device parts with sizes comparable to the characteristic length-scale of the polycrystalline silicon film morphology. The relevant output of micro electro-mechanical systems (MEMS) is thus more and more affected by a scattering, induced by features resulting from the micro-fabrication process. We recently proposed an on-chip testing device, specifically designed to enhance the aforementioned scattering in compliance with fabrication constraints. We proved that the experimentally measured scattering cannot be described by allowing only for the morphology-affected mechanical properties of the silicon films, and etch defects must be properly accounted for too. In this work, we discuss a fully stochastic framework allowing for the local fluctuations of the stiffness and of the etch-affected geometry of the silicon film. The provided semi-analytical solution is shown to catch efficiently the measured scattering in the C-V plots collected through the test structure. This approach opens up the possibility to learn on-line specific features of the devices, and to reduce the time required for their calibration.

Fabrication of Three-Dimensional Micro-Structures with Two-Photon Absorption by Femtosecond Laser

2006 ◽  
Vol 532-533 ◽  
pp. 568-571
Author(s):  
Ming Zhou ◽  
Hai Feng Yang ◽  
Li Peng Liu ◽  
Lan Cai
Keyword(s):  
Photonic Crystal ◽  
Femtosecond Laser ◽  
Detection System ◽  
Three Dimensional ◽  
Photon Absorption ◽  
Micro Fabrication ◽  
Two Photon Absorption ◽  
Two Photon ◽  
Photo Polymerization ◽  
System A

The photo-polymerization induced by Two-Photon Absorption (TPA) is tightly confined in the focus because the efficiency of TPA is proportional to the square of intensity. Three-dimensional (3D) micro-fabrication can be achieved by controlling the movement of the focus. Based on this theory, a system for 3D-micro-fabrication with femtosecond laser is proposed. The system consists of a laser system, a microscope system, a real-time detection system and a 3D-movement system, etc. The precision of micro-machining reaches a level down to 700nm linewidth. The line width was inversely proportional to the fabrication speed, but proportional to laser power and NA. The experiment results were simulated, beam waist of 0.413μm and TPA cross section of 2×10-54cm4s was obtained. While we tried to optimize parameters, we also did some research about its applications. With TPA photo-polymerization by means of our experimental system, 3D photonic crystal of wood-pile structure twelve layers and photonic crystal fiber are manufactured. These results proved that the micro-fabrication system of TPA can not only obtain the resolution down to sub-micron level, but also realize real 3D micro-fabrication.

A New Specimen for Measuring the Interfacial Toughness of Al-0.5%Cu Thin Film on Si Substrate

2005 ◽  
Vol 297-300 ◽  
pp. 521-526
Author(s):  
Insu Jeon ◽  
Masaki Omiya ◽  
Hirotsugu Inoue ◽  
Kikuo Kishimoto ◽  
Tadashi Asahina
Keyword(s):  
Thin Film ◽  
The Finite Element Method ◽  
Si Substrate ◽  
Detailed Structure ◽  
Micro Fabrication ◽  
Interfacial Toughness ◽  
Linear Elastic ◽  
Elastic Fracture ◽  
Cu Thin Film ◽  
Research Show

A new specimen is proposed to measure the interfacial toughness between the Al-0.5%Cu thin film and the Si substrate. The plain and general micro-fabrication processes are sufficient to fabricate the specimen. With the help of the finite element method and the concepts of the linear elastic fracture mechanics, the detailed structure for this specimen is modeled and evaluated. The results obtained from this research show that the proposed specimen provides efficient and convenient method to measure the interfacial toughness between the Al-Cu thin film and the Si substrate.

Development of Membrane Micro Embossing (MeME) Process for Self-Supporting Polymer Membrane Microchannel

2005 ◽  
Author(s):  
Masashi Ikeuchi ◽  
Koji Ikuta
Keyword(s):  
Glass Transition ◽  
Transition Temperature ◽  
Polymer Membrane ◽  
Mold Surface ◽  
Thermoplastic Polymer ◽  
Master Mold ◽  
Thin Membrane ◽  
Micro Fabrication ◽  
Micro Scale ◽  
Planar Membrane

In this work, we have successfully fabricated self-supporting polymer membrane microchannels with width of 50μm, depth of 50μm, and wall thickness of ~5μm. To fabricate this self-supporting polymer membrane microchannel, we have developed novel micro fabrication process named “membrane micro embossing (MeME)”. In this process, a thin (~μm) thermoplastic polymer membrane set between a master mold and a deformable support substrate is heated to glass transition temperature, and pressed to fit the membrane onto the mold surface. By heat-sealing the embossed membrane with another planar membrane, we can fabricate sealed membrane microchannels. This membrane microchannel surrounded by only thin membrane walls will provide a powerful platform for micro-scale biological and chemical analysis.

Residual Stress Measurement and Simulation of 3C-SiC Single and Poly Crystal Cantilevers

2010 ◽  
Vol 645-648 ◽  
pp. 865-868 ◽  
Author(s):  
Ruggero Anzalone ◽  
Massimo Camarda ◽  
Daniel Alquier ◽  
M. Italia ◽  
Andrea Severino ◽  
...  
Keyword(s):  
Experimental Data ◽  
Theoretical Study ◽  
Stress Measurement ◽  
Bulk Material ◽  
Raman Shift ◽  
Silicon Substrates ◽  
Free Standing ◽  
Element Analysis ◽  
Micro Fabrication ◽  
Sic Films

The fabrication of SiC MEMS-based sensors requires new processes able to realize microstructures on either bulk material or on the SiC surface. The hetero-epitaxial growth of 3C-SiC on silicon substrates allows one to overcome the traditional limitations of SiC micro-fabrication. In this work a comparison between single crystal and poly crystal 3C-SiC micro-machined structures will be presented. The free-standing structures realized (cantilevers and membrane) are also a suitable method for residual field stress investigation in 3C-SiC films. Measurement of the Raman shift indicates that the mono and poly-crystal 3C-SiC structures release the stress in different ways. Finite element analysis was performed to determine the stress field inside the films and provided a good fit to the experimental data. A comprehensive experimental and theoretical study of 3C-SiC MEMS structures has been performed and is presented.

scholarly journals 2020 IUPAC-ThalesNano Prize In Flow Chemistry and Microfluidics–Call For Nominations

2020 ◽  
Vol 42 (2) ◽  
pp. 26-26
Keyword(s):  
Systems Engineering ◽  
Flow Chemistry ◽  
Outstanding Contribution ◽  
Micro Fabrication ◽  
Micro Systems

Abstract The IUPAC-ThalesNano Prize in Flow Chemistry and Microfluidics is to be awarded to an internationally recognized scientist, whose activities or published accounts have made an outstanding contribution in the field of flow chemistry, microfluidics, micro fabrication, and micro systems engineering in academia or industry. Nomination materials should be submitted by 31 May 2020 by visiting the website.

Development of Small Tool by Micro Fabrication System Applying Elid Grinding Technique

2005 ◽  
pp. 491-495 ◽  
Author(s):  
Yoshihiro Uehara ◽  
Hitoshi Ohmori ◽  
Yutaka Yamagata ◽  
Sei Moriyasu ◽  
Weimin Lin ◽  
...  
Keyword(s):  
Micro Fabrication ◽  
Elid Grinding ◽  
Grinding Technique ◽  
Small Tool

Autonomous Control of Non-Silicon MEMS Flexible Micro-Assembly Line

2014 ◽  
Vol 496-500 ◽  
pp. 1468-1472
Author(s):  
Gao Yang Zhang ◽  
Xin Jin ◽  
Zhi Jing Zhang
Keyword(s):  
Assembly Line ◽  
High Volume ◽  
Research Community ◽  
Autonomous Control ◽  
Assembly System ◽  
Micro Fabrication ◽  
Micro Assembly ◽  
Wide Range ◽  
Micro Systems ◽  
Real Challenge

A wide range of micro-components can today be produced using various micro-fabrication techniques. The efficient high volume assembly of complex micro-systems consisting of vast single components (i.e., hybrid micro-systems) is, however, a difficult task that is seen to be a real challenge for the robotic research community. It is necessary to conceive flexible, highly precise and fast micro-assembly methods. In this paper, a frame of a micro-assembly system in the form of flexible micro-assembly line and its autonomous control is presented. Implementation of the control system are described and the procedure of autonomous control is described as well.

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