Forming in hydrogenated amorphous silicon metal-semiconductor-metal devices using bipolar pulse stressing

2005 ◽  
Vol 41 (2) ◽  
pp. 98 ◽  
Author(s):  
J.O. Orwa ◽  
S.R.P. Silva ◽  
J.M. Shannon
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Bipolar Pulse ◽  
Metal Semiconductor Metal ◽  
Hydrogenated Amorphous

High-performance metal-semiconductor-metal photodetector with a thin hydrogenated amorphous silicon layer on crystalline silicon

1995 ◽  
Vol 31 (24) ◽  
pp. 2123-2124 ◽  
Author(s):  
Li-Hong Laih ◽  
Jyh-Wong Hong ◽  
Tean-Sen Jen ◽  
Rong-Heng Yuang ◽  
Wen-Chin Tsay ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
High Performance ◽  
Crystalline Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Layer ◽  
Metal Semiconductor Metal ◽  
Hydrogenated Amorphous

BONDING IN HYDROGENATED AMORPHOUS SILICON

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-773-C4-777 ◽  
Author(s):  
H. R. Shanks ◽  
F. R. Jeffrey ◽  
M. E. Lowry
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Hydrogenated Amorphous

High Rate Deposition of Stable Hydrogenated Amorphous Silicon in Transition from Amorphous to Microcrystalline Silicon

2003 ◽  
Vol 762 ◽  
Author(s):  
Guofu Hou ◽  
Xinhua Geng ◽  
Xiaodan Zhang ◽  
Ying Zhao ◽  
Junming Xue ◽  
...  
Keyword(s):  
Phase Transition ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
High Rate ◽  
Very High Frequency ◽  
High Quality ◽  
Working Pressure ◽  
Hydrogen Dilution ◽  
Hydrogenated Amorphous

AbstractHigh rate deposition of high quality and stable hydrogenated amorphous silicon (a-Si:H) films were performed near the threshold of amorphous to microcrystalline phase transition using a very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of hydrogen dilution on optic-electronic and structural properties of these films was investigated by Fourier-transform infrared (FTIR) spectroscopy, Raman scattering and constant photocurrent method (CPM). Experiment showed that although the phase transition was much influenced by hydrogen dilution, it also strongly depended on substrate temperature, working pressure and plasma power. With optimized condition high quality and high stable a-Si:H films, which exhibit σph/σd of 4.4×106 and deposition rate of 28.8Å/s, have been obtained.

Sign in / Sign up

Export Citation Format

Share Document