Scanning-electron-beam annealing of ion-implanted p-n junction diodes

1979 ◽  
Vol 15 (14) ◽  
pp. 433 ◽  
Author(s):  
R.A. McMahon ◽  
H. Ahmed ◽  
J.D. Speight ◽  
R.M. Dobson
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Scanning Electron ◽  
Ion Implanted

Scanning Electron Beam Annealing of P-Ion-Implanted Si(100) and (111) Substrates

1984 ◽  
Vol 23 (Part 1, No. 8) ◽  
pp. 1065-1069 ◽  
Author(s):  
Hiroshi Ishiwara ◽  
Kunihiro Suzuki
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Scanning Electron ◽  
Ion Implanted

High speed scanning electron beam annealing of ion-implanted silicon layers

1980 ◽  
Vol 73 (1) ◽  
pp. 221-226 ◽  
Author(s):  
S. Schiller ◽  
S. Panzer ◽  
R. Klabes
Keyword(s):  
Electron Beam ◽  
High Speed ◽  
Scanning Electron Beam ◽  
Scanning Electron ◽  
Ion Implanted

High‐resolution scanning electron‐beam annealing of ion‐implanted silicon

1979 ◽  
Vol 35 (6) ◽  
pp. 463-466 ◽  
Author(s):  
K. N. Ratnakumar ◽  
R. F. W. Pease ◽  
D. J. Bartelink ◽  
N. M. Johnson ◽  
J. D. Meindl
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Scanning Electron Beam ◽  
Scanning Electron ◽  
Ion Implanted

Automatic pattern positioning of scanning electron beam exposure

1970 ◽  
Vol 17 (6) ◽  
pp. 450-457 ◽  
Author(s):  
S. Miyauchi ◽  
K. Tanaka ◽  
J.C. Russ
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Scanning Electron

Investigation of scanning electron beam parameters in terms of the disk-charged approximation for the sample potential

Optik ◽  
2016 ◽  
Vol 127 (17) ◽  
pp. 6978-6981 ◽  
Author(s):  
Hassan N. Al-Obaidi ◽  
Musatfa M. Abid ◽  
Wasan J. Kadhem
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Beam Parameters ◽  
Scanning Electron

A dual-pulse scanning electron beam annealer

1987 ◽  
Vol 20 (7) ◽  
pp. 901-905 ◽  
Author(s):  
M J Hart ◽  
A G R Evans ◽  
N K Bartlett
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Scanning Electron

scholarly journals Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam

2016 ◽  
Vol 7 (1) ◽  
Author(s):  
Atsufumi Hirohata ◽  
Yasuaki Yamamoto ◽  
Benedict A. Murphy ◽  
Andrew J. Vick
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Non Destructive ◽  
Scanning Electron
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