scholarly journals Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam

2016 ◽  
Vol 7 (1) ◽  
Author(s):  
Atsufumi Hirohata ◽  
Yasuaki Yamamoto ◽  
Benedict A. Murphy ◽  
Andrew J. Vick
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Non Destructive ◽  
Scanning Electron

Automatic pattern positioning of scanning electron beam exposure

1970 ◽  
Vol 17 (6) ◽  
pp. 450-457 ◽  
Author(s):  
S. Miyauchi ◽  
K. Tanaka ◽  
J.C. Russ
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Scanning Electron

Investigation of scanning electron beam parameters in terms of the disk-charged approximation for the sample potential

Optik ◽  
2016 ◽  
Vol 127 (17) ◽  
pp. 6978-6981 ◽  
Author(s):  
Hassan N. Al-Obaidi ◽  
Musatfa M. Abid ◽  
Wasan J. Kadhem
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Beam Parameters ◽  
Scanning Electron

A dual-pulse scanning electron beam annealer

1987 ◽  
Vol 20 (7) ◽  
pp. 901-905 ◽  
Author(s):  
M J Hart ◽  
A G R Evans ◽  
N K Bartlett
Keyword(s):  
Electron Beam ◽  
Scanning Electron Beam ◽  
Scanning Electron
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