TiO2 thin films by chemical vapour deposition: control of the deposition process and film characterisation

1993 ◽  
Vol 3 (11) ◽  
pp. 1137 ◽  
Author(s):  
Zhong-Xin Chen ◽  
Anke Derking
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Deposition Process ◽  
Tio2 Thin Films ◽  
Deposition Control

scholarly journals Electronic properties of antimony-doped anatase TiO2 thin films prepared by aerosol assisted chemical vapour deposition

2017 ◽  
Vol 5 (37) ◽  
pp. 9694-9701 ◽  
Author(s):  
Davinder S. Bhachu ◽  
Russell G. Egdell ◽  
Gopinathan Sankar ◽  
Claire J. Carmalt ◽  
Ivan P. Parkin
Keyword(s):  
Thin Films ◽  
Electronic Properties ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Anatase Tio2 ◽  
Spectroscopic Techniques ◽  
Tio2 Thin Films

The electronic properties of antimony-doped anatase (TiO2) thin films deposited via aerosol assisted chemical vapour deposition were investigated by a range of spectroscopic techniques.

scholarly journals Universal synthesis method for mixed phase TiO2(B)/anatase TiO2 thin films on substrates via a modified low pressure chemical vapour deposition (LPCVD) route

2016 ◽  
Vol 4 (15) ◽  
pp. 5685-5699 ◽  
Author(s):  
Yothin Chimupala ◽  
Patcharanan Junploy ◽  
Trevor Hardcastle ◽  
Aidan Westwood ◽  
Andrew Scott ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Synthesis Method ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Anatase Tio2 ◽  
Mixed Phase ◽  
Tio2 Thin Films ◽  
Pressure Chemical

We present a universal synthesis method for mixed phase TiO2(B)/anatase thin films on any substrate.

scholarly journals In situ mass spectrometry analysis of chemical vapour deposition of TiO2 thin films to study gas phase mechanisms

RSC Advances ◽  
2016 ◽  
Vol 6 (113) ◽  
pp. 111797-111805 ◽  
Author(s):  
Ben J. Blackburn ◽  
Charalampos Drosos ◽  
Dean B. Brett ◽  
Michael A. Parkes ◽  
Claire J. Carmalt ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
Gas Phase ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Mass Spectrometry Analysis ◽  
Tio2 Thin Films ◽  
Spectrometry Analysis

In situ mass spectrometry measurements has been used to study as phase intermediates in CVD of TiO2 thin films.

scholarly journals Correction: Electronic properties of antimony-doped anatase TiO2 thin films prepared by aerosol assisted chemical vapour deposition

2019 ◽  
Vol 7 (14) ◽  
pp. 4268-4268
Author(s):  
Davinder S. Bhachu ◽  
Tomos G. A. A. Harris ◽  
Russell G. Egdell ◽  
Gopinathan Sankar ◽  
Claire J. Carmalt ◽  
...  
Keyword(s):  
Thin Films ◽  
Electronic Properties ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Anatase Tio2 ◽  
Tio2 Thin Films

Correction for ‘Electronic properties of antimony-doped anatase TiO2 thin films prepared by aerosol assisted chemical vapour deposition’ by Davinder S. Bhachu et al., J. Mater. Chem. C, 2017, 5, 9694–9701.

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