In situ mass spectrometry analysis of chemical vapour deposition of TiO2 thin films to study gas phase mechanisms
Keyword(s):
In situ mass spectrometry measurements has been used to study as phase intermediates in CVD of TiO2 thin films.
2017 ◽
Vol 5
(37)
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pp. 9694-9701
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2002 ◽
Vol 538-539
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pp. 165-172
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2002 ◽
Vol 27
(1)
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pp. 61-68
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2002 ◽
Vol 151-152
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pp. 36-41
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2016 ◽
Vol 4
(15)
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pp. 5685-5699
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1993 ◽
Vol 20
(1-2)
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pp. 153-156
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1999 ◽
Vol 8
(2-5)
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pp. 226-230
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