Atomic and Molecular Layer Deposition Area Selective Deposition using alternate deposition and etch super-cycle strategies.
Keyword(s):
Area Selective Deposition (ASD) is a bottom-up process leading to a uniform deposit in only desired areas of a patterned substrate, avoiding the use of photolithography for patterning. However, whatever...
2020 ◽
Keyword(s):
Keyword(s):
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