About the importance of purge time in molecular layer deposition of alucone films
In MLD of alucone using trimethylaluminum (TMA) and ethylene glycol (EG), TMA is known to infiltrate into the MLD film taking very long to outgas. An insufficient purge can then lead to an additional CVD component in the overall growth.
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2009 ◽
Vol 15
(4-6)
◽
pp. 112-121
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2020 ◽
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