Epitaxial and large area Sb2Te3 thin films on silicon by MOCVD
Keyword(s):
Highly oriented antimony telluride thin films are prepared by room temperature metalorganic chemical vapor deposition on Si(111).
2003 ◽
Vol 18
(1)
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pp. 106-110
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1993 ◽
Vol 32
(Part 1, No. 2)
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pp. 726-730
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2000 ◽
Vol 39
(Part 1, No. 7A)
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pp. 3860-3862
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