Low-temperature crystallization and paraelectric–ferroelectric phase transformation in nanoscale ZrO2 thin films induced by atomic layer plasma treatment

2020 ◽  
Vol 8 (11) ◽  
pp. 3669-3677
Author(s):  
Sheng-Han Yi ◽  
Kuei-Wen Huang ◽  
Hsin-Chih Lin ◽  
Miin-Jang Chen
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Low Temperature ◽  
Plasma Treatment ◽  
Ferroelectric Phase ◽  
Atomic Layer ◽  
Treatment Technique ◽  
Low Temperature Crystallization ◽  
Temperature Crystallization

Crystallization and ferroelectricity with high endurance are achieved in ZrO2 thin films at low temperature using an atomic layer plasma treatment technique.

Lattice Guiding for Low Temperature Crystallization of Rhombohedral Perovskite-Structured Oxide Thin Films

2010 ◽  
Vol 10 (2) ◽  
pp. 761-764 ◽  
Author(s):  
Sharath Sriram ◽  
Madhu Bhaskaran ◽  
David R. G. Mitchell ◽  
Arnan Mitchell
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Oxide Thin Films ◽  
Low Temperature Crystallization ◽  
Temperature Crystallization

A study on low-temperature crystallization of SrBi2Ta2O9 thin films prepared by sol-gel method using steam curing process

1999 ◽  
Vol 26 (1-4) ◽  
pp. 187-195 ◽  
Author(s):  
Yoshihiro Sawada ◽  
Hideya Kobari ◽  
Yoshimi Sato ◽  
Akira Hashimoto ◽  
Ichiro Koiwa ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Sol Gel ◽  
Curing Process ◽  
Steam Curing ◽  
Gel Method ◽  
Sol Gel Method ◽  
Low Temperature Crystallization ◽  
Temperature Crystallization
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