A new route for fabricating polymer optical microcavities
SU-8 microcavities with an ultra-smooth surface and high Q factors are demonstrated by using a simple and low cost self-assembly method.
2003 ◽
Vol 42
(Part 2, No. 7B)
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pp. L852-L855
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2016 ◽
Vol 120
(22)
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pp. 11938-11946
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Keyword(s):
2008 ◽
Vol 8
(6)
◽
pp. 2996-3002
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Keyword(s):