Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

Brett B. Lewis; Brittnee A. Mound; Bernadeta Srijanto; Jason D. Fowlkes; George M. Pharr; Philip D. Rack

doi:10.1039/c7nr05274j

Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

Nanoscale ◽

10.1039/c7nr05274j ◽

2017 ◽

Vol 9 (42) ◽

pp. 16349-16356 ◽

Cited By ~ 15

Author(s):

Brett B. Lewis ◽

Brittnee A. Mound ◽

Bernadeta Srijanto ◽

Jason D. Fowlkes ◽

George M. Pharr ◽

...

Keyword(s):

Electron Beam ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Electron Beam Induced Deposition ◽

Scanning Electron

Nanomechanical measurements of platinum–carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging.

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In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope

Microelectronic Engineering ◽

10.1016/s0167-9317(03)00160-6 ◽

2003 ◽

Vol 67-68 ◽

pp. 963-969 ◽

Cited By ~ 9

Author(s):

S. Bauerdick ◽

C. Burkhardt ◽

R. Rudorf ◽

W. Barth ◽

V. Bucher ◽

...

Keyword(s):

Atomic Force Microscopy ◽

Electron Beam ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

In Situ Monitoring ◽

Force Microscopy ◽

Atomic Force ◽

Electron Beam Induced Deposition ◽

Scanning Electron

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Assembly inside a Scanning Electron Microscope using Electron Beam induced Deposition

2006 IEEE/RSJ International Conference on Intelligent Robots and Systems ◽

10.1109/iros.2006.282237 ◽

2006 ◽

Cited By ~ 9

Author(s):

T. Wich ◽

T. Sievers ◽

S. Fatikow

Keyword(s):

Electron Beam ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Electron Beam Induced Deposition ◽

Scanning Electron

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In situ scanning electron microscope electrical characterization of GaN nanowire nanodiodes using tungsten and tungsten/gallium nanoprobes

Solid State Communications ◽

10.1016/j.ssc.2009.06.035 ◽

2009 ◽

Vol 149 (39-40) ◽

pp. 1608-1610 ◽

Cited By ~ 4

Author(s):

Yong Lin ◽

Qiming Li ◽

Andrew Armstrong ◽

George T. Wang

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Electrical Characterization ◽

Gan Nanowire ◽

Scanning Electron ◽

And Tungsten

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3D Reconstruction and in Situ Characterization of Microfiltration Membranes in an Environmental Scanning Electron Microscope

Procedia Engineering ◽

10.1016/j.proeng.2012.08.847 ◽

2012 ◽

Vol 44 ◽

pp. 1510-1513

Author(s):

P. Poelt ◽

H. Reingruber ◽

A. Zankel ◽

C. Mayrhofer

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

3D Reconstruction ◽

Environmental Scanning Electron Microscope ◽

Environmental Scanning ◽

In Situ Characterization ◽

Microfiltration Membranes ◽

Scanning Electron

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Parallel electron-beam-induced deposition using a multi-beam scanning electron microscope

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3656027 ◽

2011 ◽

Vol 29 (6) ◽

pp. 06F310 ◽

Cited By ~ 10

Author(s):

P. C. Post ◽

A. Mohammadi-Gheidari ◽

C. W. Hagen ◽

P. Kruit

Keyword(s):

Electron Beam ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Beam Scanning ◽

Electron Beam Induced Deposition ◽

Scanning Electron

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A new in situ method for the characterization of membranes in a wet state in the environmental scanning electron microscope

Journal of Membrane Science ◽

10.1016/j.memsci.2012.01.031 ◽

2012 ◽

Vol 399-400 ◽

pp. 86-94 ◽

Cited By ~ 17

Author(s):

H. Reingruber ◽

A. Zankel ◽

C. Mayrhofer ◽

P. Poelt

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Environmental Scanning Electron Microscope ◽

Environmental Scanning ◽

In Situ Method ◽

Scanning Electron

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In situ production and defect characterization of laser PVD layers from YBaCuO HTSC targets inside a scanning electron microscope

Journal of Materials Science Materials in Electronics ◽

10.1007/bf00701086 ◽

1992 ◽

Vol 3 (1) ◽

pp. 5-10 ◽

Cited By ~ 1

Author(s):

S. Menzel ◽

K. Wetzig

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Defect Characterization ◽

In Situ Production ◽

Scanning Electron

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Focused Electron-Beam-Induced Deposition of 3 nm Dots in a Scanning Electron Microscope

Nano Letters ◽

10.1021/nl900717r ◽

2009 ◽

Vol 9 (5) ◽

pp. 2149-2152 ◽

Cited By ~ 73

Author(s):

Leon van Kouwen ◽

Aurelien Botman ◽

Cornelis W. Hagen

Keyword(s):

Electron Beam ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Electron Beam Induced Deposition ◽

Scanning Electron

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An In-Situ Prepared Nano-Manipulator Tip for Electrical Characterization of Free Standing Graphene Like Sheets Inside a Focused Ion Beam/Scanning Electron Microscope

Journal of Nanoelectronics and Optoelectronics ◽

10.1166/jno.2011.1154 ◽

2011 ◽

Vol 6 (2) ◽

pp. 162-168

Author(s):

T. Blom ◽

S. H. M. Jafri ◽

E. Widenkvist ◽

U. Jansson ◽

H. Grennberg ◽

...

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Focused Ion Beam ◽

Ion Beam ◽

Electrical Characterization ◽

Free Standing ◽

Beam Scanning ◽

Scanning Electron

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In Situ Characterization of Inconel 718 Post-Dynamic Recrystallization within a Scanning Electron Microscope

Metals ◽

10.3390/met7110476 ◽

2017 ◽

Vol 7 (11) ◽

pp. 476 ◽

Cited By ~ 12

Author(s):

Meriem Zouari ◽

Roland Logé ◽

Nathalie Bozzolo

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Dynamic Recrystallization ◽

Inconel 718 ◽

In Situ Characterization ◽

Scanning Electron

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