Highly conductive air-stable ZnO thin film formation under in situ UV illumination for an indium-free transparent electrode
Keyword(s):
Zno Film
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In situ UV irradiation during ALD cycles generates oxygen-vacancies, partially removes O–H bonds, and thereby produces a highly transparent and highly conductive air-stable ZnO film.
2018 ◽
Vol 122
(31)
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pp. 6438-6444
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1993 ◽
Vol 11
(2)
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pp. 307-313
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2015 ◽
Vol 349
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pp. 757-762
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2002 ◽
Vol 20
(5)
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pp. 1755-1758
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2020 ◽
Vol 8
(10)
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pp. 5086-5094
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