In situ characterisation of thin-film formation in molecular low-temperature plasmas

J. Meichsner; K. Li

doi:10.1007/s003390100815

In situ characterisation of thin-film formation in molecular low-temperature plasmas

Applied Physics A ◽

10.1007/s003390100815 ◽

2001 ◽

Vol 72 (5) ◽

pp. 565-571 ◽

Cited By ~ 7

Author(s):

J. Meichsner ◽

K. Li

Keyword(s):

Thin Film ◽

Low Temperature ◽

Film Formation ◽

Thin Film Formation ◽

Low Temperature Plasmas

Download Full-text

Plasma Processing. Thin Film Formation and Surface Modification by Low Temperature Plasmas.

Kakuyūgō kenkyū ◽

10.1585/jspf1958.68.577 ◽

1992 ◽

Vol 68 (6) ◽

pp. 577-585

Author(s):

Tomoaki Hino ◽

Ichiro Fujita ◽

Toshiro Yamashina

Keyword(s):

Thin Film ◽

Surface Modification ◽

Low Temperature ◽

Film Formation ◽

Plasma Processing ◽

Thin Film Formation ◽

Low Temperature Plasmas

Download Full-text

In Situ Measurement of Exciton Dynamics During Thin-Film Formation Using Single-Shot Transient Absorption

The Journal of Physical Chemistry A ◽

10.1021/acs.jpca.8b06248 ◽

2018 ◽

Vol 122 (31) ◽

pp. 6438-6444 ◽

Cited By ~ 5

Author(s):

Kelly S. Wilson ◽

Cathy Y. Wong

Keyword(s):

Thin Film ◽

Transient Absorption ◽

Film Formation ◽

In Situ Measurement ◽

Single Shot ◽

Exciton Dynamics ◽

Thin Film Formation

Download Full-text

Influence of stacking order and intermediate phase at low temperature on Cu2ZnSnS4 thin film formation for solar cell

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-018-9954-7 ◽

2018 ◽

Vol 29 (21) ◽

pp. 18397-18403 ◽

Cited By ~ 1

Author(s):

Kwang-Soo Lim ◽

Seong-Man Yu ◽

Ki-Bong Nam ◽

Qicheng Hu ◽

Tae-Sik Oh ◽

...

Keyword(s):

Thin Film ◽

Solar Cell ◽

Low Temperature ◽

Intermediate Phase ◽

Film Formation ◽

Stacking Order ◽

Thin Film Formation ◽

Cu2znsns4 Thin Film

Download Full-text

Study of (Ti,Zr)C:H/a-C:H nanocomposite thin film formation by low temperature reactive high power impulse magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2020.125958 ◽

2020 ◽

Vol 398 ◽

pp. 125958 ◽

Cited By ~ 1

Author(s):

Christian Poltorak ◽

Michael Stüber ◽

Harald Leiste ◽

Andreas Bergmaier ◽

Sven Ulrich

Keyword(s):

Thin Film ◽

Low Temperature ◽

Magnetron Sputtering ◽

High Power ◽

Film Formation ◽

Nanocomposite Thin Film ◽

Thin Film Formation

Download Full-text

2D and 3D thin film formation and growth mechanisms in metal electrocrystallization — an atomistic view by in situ STM

Surface Science ◽

10.1016/0039-6028(95)00576-5 ◽

1995 ◽

Vol 335 ◽

pp. 32-43 ◽

Cited By ~ 47

Author(s):

W.J. Lorenz ◽

G. Staikov

Keyword(s):

Thin Film ◽

Film Formation ◽

Growth Mechanisms ◽

In Situ Stm ◽

Thin Film Formation ◽

2D And 3D

Download Full-text

In situ substrate surface cleaning by low‐energy ion bombardment for high quality thin film formation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578730 ◽

1993 ◽

Vol 11 (2) ◽

pp. 307-313 ◽

Cited By ~ 18

Author(s):

Y. Aoki ◽

S. Aoyama ◽

H. Uetake ◽

K. Morizuka ◽

T. Ohmi

Keyword(s):

Thin Film ◽

Film Formation ◽

Substrate Surface ◽

Ion Bombardment ◽

Surface Cleaning ◽

Low Energy ◽

High Quality ◽

Thin Film Formation

Download Full-text

Characterization of HfO N thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas

Applied Surface Science ◽

10.1016/j.apsusc.2015.05.066 ◽

2015 ◽

Vol 349 ◽

pp. 757-762 ◽

Cited By ~ 8

Author(s):

Young Bok Lee ◽

Il-Kwon Oh ◽

Edward Namkyu Cho ◽

Pyung Moon ◽

Hyungjun Kim ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Film Formation ◽

Atomic Layer ◽

Layer Deposition ◽

Thin Film Formation

Download Full-text

Low temperature amorphous silicon carbide thin film formation process on aluminum surface using monomethylsilane gas and trichlorosilane gas

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2014.01.020 ◽

2014 ◽

Vol 401 ◽

pp. 523-526 ◽

Cited By ~ 1

Author(s):

Hitoshi Habuka ◽

Masaki Tsuji ◽

Azumi Hirooka

Keyword(s):

Thin Film ◽

Silicon Carbide ◽

Low Temperature ◽

Amorphous Silicon ◽

Formation Process ◽

Film Formation ◽

Aluminum Surface ◽

Amorphous Silicon Carbide ◽

Thin Film Formation

Download Full-text

Technical thin film formation methods in low temperature plasma

Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) ◽

10.1109/imtc.1994.351914 ◽

2002 ◽

Author(s):

K.I. Montasser ◽

O.I. Mohamed

Keyword(s):

Thin Film ◽

Low Temperature ◽

Film Formation ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Thin Film Formation

Download Full-text

Titanium Oxide Nanoparticles Precipitated from Low-Temperature Aqueous Solutions: II. Thin-Film Formation and Microstructure Developments

Journal of the American Ceramic Society ◽

10.1111/j.1551-2916.2010.03678.x ◽

2010 ◽

Author(s):

Guangneng Zhang ◽

Biplab K. Roy ◽

Lawrence F. Allard ◽

Junghyun Cho

Keyword(s):

Thin Film ◽

Low Temperature ◽

Aqueous Solutions ◽

Titanium Oxide ◽

Film Formation ◽

Oxide Nanoparticles ◽

Titanium Oxide Nanoparticles ◽

Thin Film Formation

Download Full-text