Heavy phosphorous tube-diffusion and non-acidic deep chemical etch-back assisted efficiency enhancement of industrial multicrystalline silicon wafer solar cells
Keyword(s):
An industrial process for tube-diffused multicrystalline silicon (multi-Si) solar cells using phosphorus gettering. A cell efficiency gain of 0.5% (absolute) is achieved with heavy chemical etch-back when compared to the as-diffused cells with same final emitter.
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Vol 14
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