Aligned silicon nanofins via the directed self-assembly of PS-b-P4VP block copolymer and metal oxide enhanced pattern transfer
A strategy combining graphoepitaxy and a metal oxide enhanced PS-b-P4VP BCP is utilized for generating aligned Si nanofins with 10 nm feature sizes.
Keyword(s):
2014 ◽
Vol 24
(45)
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pp. 7224-7224
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2013 ◽
Vol 737
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pp. 133-136
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Keyword(s):
2005 ◽
Vol 42
(3)
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pp. 180-183
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