scholarly journals Aligned silicon nanofins via the directed self-assembly of PS-b-P4VP block copolymer and metal oxide enhanced pattern transfer

Nanoscale ◽  
2015 ◽  
Vol 7 (15) ◽  
pp. 6712-6721 ◽  
Author(s):  
Cian Cummins ◽  
Anushka Gangnaik ◽  
Roisin A. Kelly ◽  
Dipu Borah ◽  
John O'Connell ◽  
...  

A strategy combining graphoepitaxy and a metal oxide enhanced PS-b-P4VP BCP is utilized for generating aligned Si nanofins with 10 nm feature sizes.

2012 ◽  
Vol 48 (90) ◽  
pp. 11115 ◽  
Author(s):  
Junzheng Wang ◽  
Suminto Winardi ◽  
Ayae Sugawara-Narutaki ◽  
Akihito Kumamoto ◽  
Tetsuya Tohei ◽  
...  

Soft Matter ◽  
2017 ◽  
Vol 13 (40) ◽  
pp. 7406-7411 ◽  
Author(s):  
I. Otsuka ◽  
N. Nilsson ◽  
D. B. Suyatin ◽  
I. Maximov ◽  
R. Borsali

Self-assembly of block copolymers (BCPs) provides an attractive nanolithography approach, which looks especially promising for fabrication of regular structures with characteristic sizes below 10 nm. Nevertheless, directed self-assembly (DSA) and pattern transfer for BCPs with such small features remain to be a challenge.


ACS Nano ◽  
2017 ◽  
Vol 11 (8) ◽  
pp. 7656-7665 ◽  
Author(s):  
Austin P. Lane ◽  
XiaoMin Yang ◽  
Michael J. Maher ◽  
Gregory Blachut ◽  
Yusuke Asano ◽  
...  

2017 ◽  
Vol 28 (14) ◽  
pp. 145301 ◽  
Author(s):  
Li-Chen Cheng ◽  
Wubin Bai ◽  
Eduardo Fernandez Martin ◽  
Kun-Hua Tu ◽  
Konstantinos Ntetsikas ◽  
...  

Nanoscale ◽  
2019 ◽  
Vol 11 (40) ◽  
pp. 18559-18567 ◽  
Author(s):  
Dae Soo Jung ◽  
Jiwon Bang ◽  
Tae Wan Park ◽  
Seung Hyup Lee ◽  
Yun Kyung Jung ◽  
...  

Unusual pattern generation of hybrid nanostructures can be achieved via the microphase separation of blended di-BCPs. We present a useful method which is capable of forming uniform hybridized BCP patterns consisting of metal and nonmetal materials.


2013 ◽  
Vol 737 ◽  
pp. 133-136 ◽  
Author(s):  
Miftakhul Huda ◽  
Jing Liu ◽  
Zulfakri bin Mohamad ◽  
You Yin ◽  
Sumio Hosaka

The self-assembly of block copolymer (BCP) has demonstrated as promising alternative technology to overcome the limitation of conventional lithography owing to its ability in forming nanostructure with size 3-100 nm. In this study, we investigated a technique to transfer self-assembled nanodots of Poly(styrene-b-dimethyl siloxane) (PS-PDMS) BCP to Si. The pattern transfer of PS-PDMS nanodots with the pitch of 33 nm and the diameter of 23 nm using CF4 etching with Carbon Hard Mask (CHM) as Mask is demonstrated. Si nanopillar with height of 51 nm was fabricated. This result improves the potential use of PS-PDMS BCP self-assembly technique for fabrication nano-electronic devices, such as quantum dot solar cell and ultrahigh density of magnetic recording.


2005 ◽  
Vol 42 (3) ◽  
pp. 180-183 ◽  
Author(s):  
S. G. Schulz ◽  
U. Frieske ◽  
H. Kuhn ◽  
G. Schmid ◽  
F. Müller ◽  
...  

Nanomaterials ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 1686
Author(s):  
Ruohong Sui ◽  
Paul A. Charpentier ◽  
Robert A. Marriott

In the past two decades, we have learned a great deal about self-assembly of dendritic metal oxide structures, partially inspired by the nanostructures mimicking the aesthetic hierarchical structures of ferns and corals. The self-assembly process involves either anisotropic polycondensation or molecular recognition mechanisms. The major driving force for research in this field is due to the wide variety of applications in addition to the unique structures and properties of these dendritic nanostructures. Our purpose of this minireview is twofold: (1) to showcase what we have learned so far about how the self-assembly process occurs; and (2) to encourage people to use this type of material for drug delivery, renewable energy conversion and storage, biomaterials, and electronic noses.


2021 ◽  
Vol 13 (4) ◽  
pp. 5772-5781
Author(s):  
Dong Hyup Kim ◽  
Ahram Suh ◽  
Geonhyeong Park ◽  
Dong Ki Yoon ◽  
So Youn Kim

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