Oxygen etching of thick MoS2 films
Oxygen annealing of thick MoS2 films results in randomly oriented and controllable triangular etched shapes, forming pits with uniform etching angles.
1988 ◽
Vol 1
(3)
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pp. 118-122
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1996 ◽
Vol 92
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pp. 491-495
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2002 ◽
Vol 158-159
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pp. 436-438
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2006 ◽
Vol 50
(7-8)
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pp. 1189-1193
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2007 ◽
Vol 154
(7)
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pp. H547
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