Decomposition of hexamethyldisilane on a hot tungsten filament and gas-phase reactions in a hot-wire chemical vapor deposition reactor

2008 ◽  
Vol 10 (18) ◽  
pp. 2543 ◽  
Author(s):  
Yujun Shi ◽  
Xinmao Li ◽  
Ling Tong ◽  
Rim Toukabri ◽  
Brett Eustergerling
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Tungsten Filament ◽  
Gas Phase Reactions ◽  
Chemical Vapor Deposition Reactor

Gas phase and surface kinetic processes in polycrystalline silicon hot-wire chemical vapor deposition

2001 ◽  
Vol 395 (1-2) ◽  
pp. 29-35 ◽  
Author(s):  
J.K Holt ◽  
M Swiatek ◽  
D.G Goodwin ◽  
R.P Muller ◽  
W.A Goddard ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Polycrystalline Silicon ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Kinetic Processes
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