ChemInform Abstract: Hot Wire Chemical Vapor Deposition Chemistry in the Gas Phase and on the Catalyst Surface with Organosilicon Compounds

ChemInform ◽  
2015 ◽  
Vol 46 (14) ◽  
pp. no-no
Author(s):  
Yujun Shi
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Catalyst Surface ◽  
Chemical Vapor ◽  
Organosilicon Compounds ◽  
Hot Wire

Gas phase and surface kinetic processes in polycrystalline silicon hot-wire chemical vapor deposition

2001 ◽  
Vol 395 (1-2) ◽  
pp. 29-35 ◽  
Author(s):  
J.K Holt ◽  
M Swiatek ◽  
D.G Goodwin ◽  
R.P Muller ◽  
W.A Goddard ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Polycrystalline Silicon ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Kinetic Processes

Real time measurements of charged gas phase nuclei during the deposition of silicon thin films by hot wire chemical vapor deposition

2013 ◽  
Vol 13 ◽  
pp. S45-S49 ◽  
Author(s):  
Ju-Seop Hong ◽  
Chan-Soo Kim ◽  
Seung-Wan Yoo ◽  
Seong-Han Park ◽  
Sung-Soo Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Real Time ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Silicon Thin Films

Gas Phase and Surface Kinetic Processes in Hot-Wire Chemical Vapor Deposition

2000 ◽  
Vol 609 ◽  
Author(s):  
J. K. Holt ◽  
M. Swiatek ◽  
D. G. Goodwin ◽  
Harry A. Atwater
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Direct Simulation Monte Carlo ◽  
Chemical Vapor ◽  
High Rate ◽  
Hot Wire ◽  
Gas Phase Chemistry ◽  
Partial Pressures ◽  
Phase Chemistry

ABSTRACTOne- and two-dimensional numerical simulations have been used to determine the parameters critical to high rate growth of high quality polycrystalline silicon via hot-wire chemical vapor deposition at silane partial pressures of 1-70 mTorr and a wire temperature of 2000°C. The Direct Simulation Monte Carlo method [1] was used, including gas-phase chemistry relevant for growth. Model predictions agree both qualitatively and quantitatively with experimental measurements.

Sign in / Sign up

Export Citation Format

Share Document