Hydrofluoric-Acid-Resistant and Hydrophobic Pure-Silica-Zeolite MEL Low-Dielectric-Constant Films

Langmuir ◽  
2009 ◽  
Vol 25 (9) ◽  
pp. 5039-5044 ◽  
Author(s):  
Christopher M. Lew ◽  
Yan Liu ◽  
Brandon Day ◽  
Grant M. Kloster ◽  
Hugo Tiznado ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Hydrofluoric Acid ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Pure Silica

High-performance fluorinated polyimide/pure silica zeolite nanocrystal hybrid films with a low dielectric constant

RSC Advances ◽  
2015 ◽  
Vol 5 (93) ◽  
pp. 76476-76482 ◽  
Author(s):  
Zhenxun Huang ◽  
Shumei Liu ◽  
Yanchao Yuan ◽  
Jianqing Zhao
Keyword(s):  
Dielectric Constant ◽  
High Performance ◽  
Low Dielectric Constant ◽  
Hybrid Films ◽  
Low Dielectric ◽  
Simple Strategy ◽  
Pure Silica ◽  
Fluorinated Polyimide ◽  
Enhanced Properties

A simple strategy for preparing the low-κ FPI hybrids with enhanced properties.

Pure-Silica-Zeolite MFI and MEL Low-Dielectric-Constant Films with Fluoro-Organic Functionalization

2008 ◽  
Vol 18 (21) ◽  
pp. 3454-3460 ◽  
Author(s):  
Christopher M. Lew ◽  
Zijian Li ◽  
Shuang Li ◽  
Son-Jong Hwang ◽  
Yan Liu ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Organic Functionalization ◽  
Low Dielectric ◽  
Pure Silica

Synthesis and Evaluation of Pure-Silica-Zeolite BEA as Low Dielectric Constant Material for Microprocessors†

2004 ◽  
Vol 43 (12) ◽  
pp. 2946-2949 ◽  
Author(s):  
Anupam Mitra ◽  
Cao ◽  
Wang ◽  
Wang ◽  
Limin Huang ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Pure Silica

Effects of Crystallinity in Spin-On Pure-Silica-Zeolite MFI Low-Dielectric-Constant Films

2004 ◽  
Vol 14 (10) ◽  
pp. 1019-1024 ◽  
Author(s):  
Z. J. Li ◽  
S. Li ◽  
H. M. Luo ◽  
Y. S. Yan
Keyword(s):  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Pure Silica

Pure-Silica-Zeolite Low-Dielectric Constant Materials

2009 ◽  
pp. 335-364 ◽  
Author(s):  
Christopher M. Lew ◽  
Minwei Sun ◽  
Yan Liu ◽  
Junlan Wang ◽  
Yushan Yan
Keyword(s):  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Pure Silica ◽  
Low Dielectric Constant Materials
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