Surface Modification of Polyimide Films via Plasma-Enhanced Chemical Vapor Deposition of Thin Silica and Nitride Films
Keyword(s):
1997 ◽
Vol 15
(3)
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pp. 1200-1205
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2016 ◽
Vol 7
(1)
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pp. 373-393
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Keyword(s):
Surface Modification of Base Materials for TEOS / O 3 Atmospheric Pressure Chemical Vapor Deposition
1992 ◽
Vol 139
(6)
◽
pp. 1690-1692
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2012 ◽
Vol 162
(1)
◽
pp. 425-434
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Keyword(s):