Surface Modification of Base Materials for TEOS / O 3 Atmospheric Pressure Chemical Vapor Deposition
1992 ◽
Vol 139
(6)
◽
pp. 1690-1692
◽
1995 ◽
Vol 24
(6)
◽
pp. 761-766
◽
Keyword(s):
2020 ◽
Vol 67
(10)
◽
pp. 4245-4249
2017 ◽
Vol 27
(13)
◽
pp. 1606469
◽
Keyword(s):
2006 ◽
Vol 45
(8A)
◽
pp. 6342-6345
◽
Keyword(s):