Time-Resolved Molecular Beam Mass Spectrometry of the Initial Stage of Particle Formation in an Ar/He/C2H2Plasma

2007 ◽  
Vol 111 (42) ◽  
pp. 10453-10459 ◽  
Author(s):  
J. Benedikt ◽  
A. Consoli ◽  
M. Schulze ◽  
A. von Keudell
Keyword(s):  
Mass Spectrometry ◽  
Molecular Beam ◽  
Particle Formation ◽  
Time Resolved ◽  
Molecular Beam Mass Spectrometry ◽  
Initial Stage

Using Molecular-Beam Mass Spectrometry to Study the Pecvd of Diamondlike Carbon Films

1993 ◽  
Vol 334 ◽  
Author(s):  
I.B. Graff ◽  
R.A. Pugliese ◽  
P.R. Westmoreland
Keyword(s):  
Mass Spectrometry ◽  
Vapor Deposition ◽  
Molecular Beam ◽  
Film Growth ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Total Flow ◽  
Measured Concentration ◽  
Molecular Beam Mass Spectrometry ◽  
Diamondlike Carbon

AbstractMolecular-beam mass spectrometry has been used to study plasma-enhanced chemical vapor deposition (PECVD) of diamondlike carbon films. A threshold-ionization technique was used to identify and quantify species in the plasma. Mole fractions of H, H2, CH4, C2H2, C2H6 and Ar were measured in an 83.3% CH4/Ar mixture at a pressure of 0.1 torr and a total flow of 30 sccm. Comparisons were made between mole fractions measured at plasma powers of 25W and 50W. These results were compared to measured concentration profiles and to film growth rates.

Flame structure study of a lean H2/N2O/Ar Flame employing molecular beam mass spectrometry and modeling

1994 ◽  
Vol 99 (2) ◽  
pp. 323-330 ◽  
Author(s):  
David C. Dayton ◽  
Cynthia M. Faust ◽  
William R. Anderson ◽  
Rosario C. Sausa
Keyword(s):  
Mass Spectrometry ◽  
Molecular Beam ◽  
Flame Structure ◽  
Structure Study ◽  
Molecular Beam Mass Spectrometry
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