Controller and Estimator Design for Regulation of Film Thickness, Surface Roughness, and Porosity in a Multiscale Thin Film Growth Process

2010 ◽  
Vol 49 (17) ◽  
pp. 7795-7806 ◽  
Author(s):  
Xinyu Zhang ◽  
Gangshi Hu ◽  
Gerassimos Orkoulas ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Film Thickness ◽  
Growth Process ◽  
Film Growth ◽  
Thin Film Growth ◽  
Estimator Design

Regulation of film thickness, surface roughness and porosity in thin film growth using deposition rate

2009 ◽  
Vol 64 (17) ◽  
pp. 3903-3913 ◽  
Author(s):  
Gangshi Hu ◽  
Gerassimos Orkoulas ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Film Thickness ◽  
Deposition Rate ◽  
Film Growth ◽  
Thin Film Growth

scholarly journals Deposition of Al Thin Film on Steel Substrate: The Role of Thickness on Crystallization and Grain Growth

Metals ◽  
2018 ◽  
Vol 9 (1) ◽  
pp. 12 ◽  
Author(s):  
Hayk Khachatryan ◽  
Sung-Nam Lee ◽  
Kyoung-Bo Kim ◽  
Moojin Kim
Keyword(s):  
Thin Film ◽  
Optical Properties ◽  
Film Thickness ◽  
Grain Growth ◽  
Growth Process ◽  
Film Growth ◽  
Specular Reflection ◽  
Steel Substrate ◽  
Al Thin Film

In this study, we deposited aluminum (Al) films of different thicknesses on steel substrate and examined their phase, microstructure, and film growth process. We estimated that films of up to 30 nm thickness were mainly amorphous in nature. When the film thickness exceeded 30 nm, crystallization was observed. The further increase in film thickness triggered grain growth, and the formation of grains up to 40 nm occurred. In such cases, the Al film had a cross-grained structure with well-developed primary grains networks that were filled with small secondary grains. We demonstrated that the microstructure played a key role in optical properties. The films below 30 nm showed higher specular reflection, whereas thicker films showed higher diffuse reflections.

Novel understanding of the YBa2Cu3O7–x thin film growth

2002 ◽  
Vol 17 (2) ◽  
pp. 302-305 ◽  
Author(s):  
D. X. Huang ◽  
Y. Nakamura ◽  
Y. Yamada ◽  
I. Hirabayshi
Keyword(s):  
Thin Film ◽  
Growth Process ◽  
Film Growth ◽  
Substrate Surface ◽  
Thin Film Growth ◽  
Competitive Growth ◽  
Ybco Thin Film ◽  
Local Surface ◽  
Cross Sectional ◽  
Oriented Film

By combining the cross-sectional observation of the randomly oriented film areas and the analyses of the film microstructural influence by the substrate-surface morphology, we achieved a novel understanding of the YBa2Cu3O7–x (YBCO) thin film growth process, which leads to an explanation of different microstructures formed in YBCO thin films. Selective and competitive growth of YBa2Cu3O7–x and Ba–Cu–O/Cu–O was found to occur in the whole film growth process depending on the local surface roughness in which the interfacial energy played a controlling role.

Dynamics and control of thin film growth process from a multicomponent gas

1997 ◽  
Vol 30 (20) ◽  
pp. 2794-2797 ◽  
Author(s):  
A L Fradkov ◽  
P Yu Guzenko ◽  
S A Kukushkin ◽  
A V Osipov
Keyword(s):  
Thin Film ◽  
Growth Process ◽  
Film Growth ◽  
Thin Film Growth ◽  
Multicomponent Gas ◽  
Dynamics And Control ◽  
And Control

Surface roughness in thin-film growth: The effect of mass transport between layers

1993 ◽  
Vol 48 (7) ◽  
pp. 4972-4975 ◽  
Author(s):  
Zhenyu Zhang ◽  
John Detch ◽  
Horia Metiu
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Mass Transport ◽  
Film Growth ◽  
Thin Film Growth
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