Feedback control of surface roughness during thin-film growth using approximate low-order ODE model

2006 ◽  
Author(s):  
Amit Varshney ◽  
Antonios Armaou
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth ◽  
Ode Model ◽  
Low Order

Feedback control of growth rate and surface roughness in thin film growth

AIChE Journal ◽  
2003 ◽  
Vol 49 (8) ◽  
pp. 2099-2113 ◽  
Author(s):  
Yiming Lou ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Growth Rate ◽  
Surface Roughness ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth

Regulation of film thickness, surface roughness and porosity in thin film growth using deposition rate

2009 ◽  
Vol 64 (17) ◽  
pp. 3903-3913 ◽  
Author(s):  
Gangshi Hu ◽  
Gerassimos Orkoulas ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Film Thickness ◽  
Deposition Rate ◽  
Film Growth ◽  
Thin Film Growth

An SDRE-Based Approach for HIV Feedback Control and Control of Thin Film Growth in a CVD Reactor

2011 ◽  
Vol 44 (1) ◽  
pp. 9601-9606 ◽  
Author(s):  
H.T. Banks ◽  
S.C. Beeler ◽  
Hee-Dae Kwon ◽  
B.M. Lewis ◽  
J.A. Toivanen ◽  
...  
Keyword(s):  
Thin Film ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth ◽  
And Control

Surface roughness in thin-film growth: The effect of mass transport between layers

1993 ◽  
Vol 48 (7) ◽  
pp. 4972-4975 ◽  
Author(s):  
Zhenyu Zhang ◽  
John Detch ◽  
Horia Metiu
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Mass Transport ◽  
Film Growth ◽  
Thin Film Growth

Simultaneous Regulation of Surface Roughness and Porosity in Thin Film Growth

2009 ◽  
Vol 42 (11) ◽  
pp. 922-927
Author(s):  
Gangshi Hu ◽  
Gerassimos Orkoulas ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Film Growth ◽  
Thin Film Growth
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