Controlled Growth of TaN, Ta3N5, and TaOxNyThin Films by Atomic Layer Deposition

1999 ◽  
Vol 11 (7) ◽  
pp. 1712-1718 ◽  
Author(s):  
Mikko Ritala ◽  
Pia Kalsi ◽  
Diana Riihelä ◽  
Kaupo Kukli ◽  
Markku Leskelä ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Layer Deposition

Controlled growth of HfO2 thin films by atomic layer deposition from cyclopentadienyl-type precursor and water

2005 ◽  
Vol 15 (23) ◽  
pp. 2271 ◽  
Author(s):  
Jaakko Niinistö ◽  
Matti Putkonen ◽  
Lauri Niinistö ◽  
Sarah L. Stoll ◽  
Kaupo KukliAlso at: University of Tartu, ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Layer Deposition

ChemInform Abstract: Controlled Growth of TaN, Ta3N5, and TaOxNy Thin Films by Atomic Layer Deposition.

ChemInform ◽  
2010 ◽  
Vol 30 (38) ◽  
pp. no-no
Author(s):  
Mikko Ritala ◽  
Pia Kalsi ◽  
Diana Riihelae ◽  
Kaupo Kukli ◽  
Markku Leskelae ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Layer Deposition

Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition

1999 ◽  
Vol 315-317 ◽  
pp. 216-221 ◽  
Author(s):  
K. Kukli ◽  
M. Peussa ◽  
L.-S. Johansson ◽  
E. Nykänen ◽  
L. Niinistö
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Layer Deposition

Phase-controlled growth of cobalt oxide thin films by atomic layer deposition

2018 ◽  
Vol 337 ◽  
pp. 404-410 ◽  
Author(s):  
Soonyoung Jung ◽  
Dip K. Nandi ◽  
Seungmin Yeo ◽  
Hyungjun Kim ◽  
Yujin Jang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Cobalt Oxide ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Oxide Thin Films ◽  
Layer Deposition

Controlled growth and properties of p-type cuprous oxide films by plasma-enhanced atomic layer deposition at low temperature

2013 ◽  
Vol 285 ◽  
pp. 373-379 ◽  
Author(s):  
Jung-Dae Kwon ◽  
Se-Hun Kwon ◽  
Tae-Hoon Jung ◽  
Kee-Seok Nam ◽  
Kwun-Bum Chung ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Cuprous Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Layer Deposition ◽  
P Type

Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

2010 ◽  
Vol 5 (1) ◽  
pp. 19-21 ◽  
Author(s):  
Mihaela Popovici ◽  
Johan Swerts ◽  
Kazuyuki Tomida ◽  
Dunja Radisic ◽  
Min-Soo Kim ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Rutile Tio2 ◽  
Layer Deposition

Orientation-Controlled Growth of Pt Films on SrTiO3 (001) by Atomic Layer Deposition

2015 ◽  
Vol 27 (19) ◽  
pp. 6779-6783 ◽  
Author(s):  
Jung Joon Pyeon ◽  
Jun-Yun Kang ◽  
Seung-Hyub Baek ◽  
Chong-Yun Kang ◽  
Jin-Sang Kim ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Layer Deposition ◽  
Pt Films

Controlled Growth of Platinum Nanoparticles on Strontium Titanate Nanocubes by Atomic Layer Deposition

Small ◽  
2009 ◽  
Vol 5 (6) ◽  
pp. 750-757 ◽  
Author(s):  
Steven T. Christensen ◽  
Jeffrey W. Elam ◽  
Federico A. Rabuffetti ◽  
Qing Ma ◽  
Steven J. Weigand ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Strontium Titanate ◽  
Platinum Nanoparticles ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Layer Deposition

Controlled growth of MoS2 by atomic layer deposition on patterned gold pads

2020 ◽  
Vol 541 ◽  
pp. 125683 ◽  
Author(s):  
Chenxi Yue ◽  
Yang Wang ◽  
Hao Liu ◽  
Lin Chen ◽  
Hao Zhu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document