Controlled growth and properties of p-type cuprous oxide films by plasma-enhanced atomic layer deposition at low temperature

2013 ◽  
Vol 285 ◽  
pp. 373-379 ◽  
Author(s):  
Jung-Dae Kwon ◽  
Se-Hun Kwon ◽  
Tae-Hoon Jung ◽  
Kee-Seok Nam ◽  
Kwun-Bum Chung ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Cuprous Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Controlled Growth ◽  
Layer Deposition ◽  
P Type

scholarly journals RBS/Channeling Analysis of Zinc Oxide Films Grown at Low Temperature by Atomic Layer Deposition

2013 ◽  
Vol 123 (5) ◽  
pp. 899-903 ◽  
Author(s):  
R. Ratajczak ◽  
A. Stonert ◽  
E. Guziewicz ◽  
S. Gierałtowska ◽  
T.A. Krajewski ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Oxide Films ◽  
Atomic Layer ◽  
Zinc Oxide Films ◽  
Layer Deposition

High-mobility p-type LixCuyO films prepared by plasma-enhanced atomic layer deposition and low-temperature annealing

2021 ◽  
pp. 131251
Author(s):  
Chia-Hsun Hsu ◽  
Chun-Hui Bao ◽  
Ming-Jie Zhao ◽  
Wan-Yu Wu ◽  
Shui-Yang Lien ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
High Mobility ◽  
Atomic Layer ◽  
Low Temperature Annealing ◽  
Layer Deposition ◽  
P Type
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