Correlating Growth Characteristics in Atomic Layer Deposition with Precursor Molecular Structure: The Case of Zinc Tin Oxide

2014 ◽  
Vol 26 (9) ◽  
pp. 2795-2802 ◽  
Author(s):  
Jukka T. Tanskanen ◽  
Carl Hägglund ◽  
Stacey F. Bent
Keyword(s):  
Molecular Structure ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Atomic Layer ◽  
Growth Characteristics ◽  
Layer Deposition ◽  
Zinc Tin Oxide

High-Performance Thin-Film Transistors of Quaternary Indium–Zinc–Tin Oxide Films Grown by Atomic Layer Deposition

2019 ◽  
Vol 11 (16) ◽  
pp. 14892-14901 ◽  
Author(s):  
In-Hwan Baek ◽  
Jung Joon Pyeon ◽  
Seong Ho Han ◽  
Ga-Yeon Lee ◽  
Byung Joon Choi ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
High Performance ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Zinc Tin Oxide ◽  
Tin Oxide Films

scholarly journals High‐Performance Zinc Tin Oxide TFTs with Active Layers Deposited by Atomic Layer Deposition

2020 ◽  
Vol 6 (7) ◽  
pp. 2000195 ◽  
Author(s):  
Christopher R. Allemang ◽  
Tae H. Cho ◽  
Orlando Trejo ◽  
Shantam Ravan ◽  
Robin E. Rodríguez ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
High Performance ◽  
Atomic Layer ◽  
Active Layers ◽  
Layer Deposition ◽  
Zinc Tin Oxide ◽  
Oxide Tfts

Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition

2014 ◽  
Vol 556 ◽  
pp. 186-194 ◽  
Author(s):  
Marja N. Mullings ◽  
Carl Hägglund ◽  
Jukka T. Tanskanen ◽  
Yesheng Yee ◽  
Scott Geyer ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Thin Film Characterization ◽  
Zinc Tin Oxide

scholarly journals Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide

2017 ◽  
Vol 146 (5) ◽  
pp. 052802 ◽  
Author(s):  
Adriaan J. M. Mackus ◽  
Callisto MacIsaac ◽  
Woo-Hee Kim ◽  
Stacey F. Bent
Keyword(s):  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Zinc Tin Oxide
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