A New Positive-Type Photosensitive Alkaline-Developable Alicyclic Polyimide Based on Poly(amic acid silylester) as a Polyimide Precursor and Diazonaphthoquinone as a Photosensitive Compound

2002 ◽  
Vol 14 (4) ◽  
pp. 1762-1766 ◽  
Author(s):  
Yasufumi Watanabe ◽  
Yuji Shibasaki ◽  
Shinji Ando ◽  
Mitsuru Ueda
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