Progress in 193-nm Single Layer Resists: The role of Photoacid Generator Structure on the Performance of Positive Resists
1998 ◽
pp. 224-236
◽
2009 ◽
Vol 6
(suppl_2)
◽
Keyword(s):
2012 ◽
Vol 32
(suppl_1)
◽
2019 ◽
Vol 49
(9)
◽
pp. 2393-2406
◽
Keyword(s):
2019 ◽
Vol 128
(6_suppl)
◽
pp. 76S-83S
◽
Keyword(s):
1996 ◽
Vol 35
(Part 2, No. 4B)
◽
pp. L528-L530
◽