Growth and Properties of Hafnicone and HfO2/Hafnicone Nanolaminate and Alloy Films Using Molecular Layer Deposition Techniques
2014 ◽
Vol 6
(19)
◽
pp. 16880-16887
◽
Keyword(s):
2012 ◽
Vol 22
(45)
◽
pp. 23935
◽
Keyword(s):
2011 ◽
Vol 11
(9)
◽
pp. 7948-7955
◽
Keyword(s):
2013 ◽
Vol 19
(4-6)
◽
pp. 204-212
◽
2012 ◽
Vol 23
(5)
◽
pp. 532-546
◽
2020 ◽
Keyword(s):