Molecular Layer Deposition of Zircone and ZrO2/Zircone Alloy Films: Growth and Properties
2013 ◽
Vol 19
(4-6)
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pp. 204-212
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2012 ◽
Vol 22
(45)
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pp. 23935
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Keyword(s):
2014 ◽
Vol 6
(19)
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pp. 16880-16887
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Keyword(s):
2020 ◽
Keyword(s):
Keyword(s):