Engineering the Interface Characteristics of Ultrananocrystalline Diamond Films Grown on Au-Coated Si Substrates

2012 ◽  
Vol 4 (8) ◽  
pp. 4169-4176 ◽  
Author(s):  
Kamatchi Jothiramalingam Sankaran ◽  
Kalpataru Panda ◽  
Balakrishnan Sundaravel ◽  
Huang-Chin Chen ◽  
I-Nan Lin ◽  
...  
Keyword(s):  
Diamond Films ◽  
Si Substrates ◽  
Ultrananocrystalline Diamond ◽  
Interface Characteristics

Diode Parameters of Heterojunctions Comprising p-Type Ultrananocrystalline Diamond Films and n-Type Si Substrates

2019 ◽  
Vol 19 (3) ◽  
pp. 1567-1573 ◽  
Author(s):  
Rawiwan Chaleawpong ◽  
Nathaporn Promros ◽  
Peerasil Charoenyuenyao ◽  
Takanori Hanada ◽  
Shinya Ohmagari ◽  
...  
Keyword(s):  
Diamond Films ◽  
Si Substrates ◽  
Ultrananocrystalline Diamond ◽  
P Type

Enhanced Diamond Nucleation by Surface Texturing of Si Substrate in SF6/O2 Plasmas

2013 ◽  
Vol 432 ◽  
pp. 61-65
Author(s):  
Jong Cheon Park ◽  
Ok Geun Jeong ◽  
Sang Youn Kim ◽  
Tae Gyu Kim ◽  
Jin Kon Kim ◽  
...  
Keyword(s):  
Surface Texturing ◽  
Diamond Films ◽  
Nucleation Density ◽  
Si Substrate ◽  
Diamond Nucleation ◽  
Mechanical Abrasion ◽  
Si Substrates ◽  
Ultrananocrystalline Diamond ◽  
Process Pressure ◽  
Density Surface

SF6/O2 plasma surface texturing was employed to pretreat Si substrate for achieving enhanced diamond nucleation density. Surface roughness of the textured Si was found to be strongly dependent on the process pressure and normalized roughness values in the range of 2-16 were obtained. Remarkably enhanced nucleation densities of ~1010 cm-2 compared to conventional mechanical abrasion were obtained after seeding for the surface textured Si substrates. Raman spectroscopy revealed that ultrananocrystalline diamond films with grain size below 10 nm were grown on the surface textured Si.

Photodetection Characteristics of Heterojunctions Comprising p-Type Ultrananocrystalline Diamond Films and n-Type Si Substrates at Low Temperatures

2017 ◽  
Vol 17 (5) ◽  
pp. 3348-3351 ◽  
Author(s):  
Takanori Hanada ◽  
Shinya Ohmagari ◽  
Abdelrahman Zkria ◽  
Nathaporn Promros ◽  
Tsuyoshi Yoshitake
Keyword(s):  
Low Temperatures ◽  
Diamond Films ◽  
Si Substrates ◽  
Ultrananocrystalline Diamond ◽  
P Type

scholarly journals Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

2021 ◽  
Vol 56 (12) ◽  
pp. 7171-7230
Author(s):  
Orlando Auciello ◽  
Dean M. Aslam
Keyword(s):  
Materials Science ◽  
Positive Impact ◽  
Diamond Films ◽  
Energy Generation ◽  
Nanoelectromechanical Systems ◽  
Environmental Sensors ◽  
Implantable Biosensors ◽  
Ultrananocrystalline Diamond ◽  
Film Synthesis ◽  
New Generation

AbstractA comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.

A novel growth model for depositing ultrananocrystalline diamond films in CH4/H2 chemistry

2021 ◽  
pp. 127280
Author(s):  
Qiang Lin ◽  
Sulin Chen ◽  
Zhe Ji ◽  
Zhewei Huang ◽  
Zhinan Zhang ◽  
...  
Keyword(s):  
Growth Model ◽  
Diamond Films ◽  
Ultrananocrystalline Diamond

Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges

2010 ◽  
Vol 204 (12-13) ◽  
pp. 1997-2001 ◽  
Author(s):  
Monika Karásková ◽  
Lenka Zajíčková ◽  
Vilma Buršíková ◽  
Daniel Franta ◽  
David Nečas ◽  
...  
Keyword(s):  
Mechanical Characterization ◽  
Diamond Films ◽  
Dual Frequency ◽  
Ultrananocrystalline Diamond

scholarly journals Transport properties of n-type ultrananocrystalline diamond films

2006 ◽  
Vol 74 (23) ◽  
Author(s):  
I. S. Beloborodov ◽  
P. Zapol ◽  
D. M. Gruen ◽  
L. A. Curtiss
Keyword(s):  
Transport Properties ◽  
Diamond Films ◽  
Ultrananocrystalline Diamond
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