Selective Atomic Layer Deposition of Metals on Graphene for Transparent Conducting Electrode Application

2020 ◽  
Vol 12 (12) ◽  
pp. 14331-14340 ◽  
Author(s):  
Minsu Kim ◽  
Shunichi Nabeya ◽  
Seung-Min Han ◽  
Min-Sik Kim ◽  
Sangbong Lee ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Transparent Conducting Electrode ◽  
Transparent Conducting ◽  
Conducting Electrode ◽  
Layer Deposition

Atomic Layer Deposition of Gallium-Doped Zinc Oxide Transparent Conducting Oxide films

2011 ◽  
Vol 1315 ◽  
Author(s):  
Paul R. Chalker ◽  
Paul A. Marshall ◽  
Simon Romani ◽  
Matthew J. Rosseinsky ◽  
Simon Rushworth ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Film Thickness ◽  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Contactless Measurement ◽  
Zinc Oxide Films ◽  
Transparent Conducting ◽  
Layer Deposition

ABSTRACTThin transparent conducting oxide (TCO) films of gallium-doped zinc oxide have been deposited on glass substrates by atomic layer deposition (ALD) using diethyl zinc, triethyl gallium and water vapour as precursors. The gallium-doped zinc oxide films were deposited over the temperature range 100-350°C. Transmission electron microscopy reveals that the as-deposited films are polycrystalline in character. The electrical resistivity of the gallium-doped zinc oxide films was evaluated using four-point probe and contactless measurement methods as a function of film thickness. The lowest sheet resistance of 16 Ω/☐ was measured from a film thickness of 400nm and a gallium content of 5 atomic percent. The electron Hall mobility of this film was 12.3 cm2/Vs. The visible transmittance of the films was 78% with a haze of 0.2%.

Atomic layer deposition of Ga-doped ZnO transparent conducting oxide substrates for CdTe-based photovoltaics

2013 ◽  
Vol 31 (1) ◽  
pp. 01A120 ◽  
Author(s):  
Paul R. Chalker ◽  
Paul A. Marshall ◽  
Simon Romani ◽  
Joseph W. Roberts ◽  
Stuart J. C. Irvine ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Transparent Conducting Oxide ◽  
Atomic Layer ◽  
Transparent Conducting ◽  
Layer Deposition ◽  
Oxide Substrates ◽  
Doped Zno
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