Wide-Angle Broadband Antireflection Coatings Prepared by Atomic Layer Deposition

2019 ◽  
Vol 11 (24) ◽  
pp. 21887-21894 ◽  
Author(s):  
Kristin Pfeiffer ◽  
Lilit Ghazaryan ◽  
Ulrike Schulz ◽  
Adriana Szeghalmi
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Wide Angle ◽  
Antireflection Coatings ◽  
Layer Deposition ◽  
Broadband Antireflection

scholarly journals Antireflection Coating on PMMA Substrates by Atomic Layer Deposition

Coatings ◽  
2020 ◽  
Vol 10 (1) ◽  
pp. 64 ◽  
Author(s):  
Pallabi Paul ◽  
Kristin Pfeiffer ◽  
Adriana Szeghalmi
Keyword(s):  
Atomic Layer Deposition ◽  
Spectral Range ◽  
Microscopic Analysis ◽  
Atomic Layer ◽  
High Volume ◽  
Antireflection Coating ◽  
Environmental Stability ◽  
Antireflection Coatings ◽  
Layer Deposition ◽  
Average Reflectance

Antireflection coatings (ARC) are essential for various optical components including such made of plastics for high volume applications. However, precision coatings on plastics are rather challenging due to typically low adhesion of the coating to the substrate. In this work, optimization of the atomic layer deposition (ALD) processes towards conformal optical thin films of Al2O3, TiO2 and SiO2 on poly(methyl methacrylate) (PMMA) has been carried out and a five-layer ARC is demonstrated. While the uncoated PMMA substrates have a reflectance of nearly 8% in the visible (VIS) spectral range, this is reduced below 1.2% for the spectral range of 420–670 nm by applying a double-side ARC. The total average reflectance is 0.7%. The optimized ALD coatings show a good adhesion to the PMMA substrates even after the climate test. Microscopic analysis on the cross-hatch areas on PMMA after the climate test indicates very good environmental stability of the ALD coatings. These results enable a possible route by ALD to deposit uniform, crack free, adhesive and environmentally durable thin film layers on sensitive thermoplastics like PMMA.

scholarly journals Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition

Coatings ◽  
2017 ◽  
Vol 7 (8) ◽  
pp. 118 ◽  
Author(s):  
Kristin Pfeiffer ◽  
Ulrike Schulz ◽  
Andreas Tünnermann ◽  
Adriana Szeghalmi
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Antireflection Coatings ◽  
Layer Deposition ◽  
Curved Glass ◽  
Glass Lenses

scholarly journals Characterization of 1064nm nanosecond laser-induced damage on antireflection coatings grown by atomic layer deposition

2012 ◽  
Vol 20 (2) ◽  
pp. 854 ◽  
Author(s):  
Zhichao Liu ◽  
Songlin Chen ◽  
Ping Ma ◽  
Yaowei Wei ◽  
Yi Zheng ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Nanosecond Laser ◽  
Antireflection Coatings ◽  
Layer Deposition ◽  
Laser Induced Damage

Wide band antireflection coatings deposited by atomic layer deposition

2013 ◽  
Author(s):  
April D. Jewell ◽  
John Hennessy ◽  
Michael E. Hoenk ◽  
Shouleh Nikzad
Keyword(s):  
Atomic Layer Deposition ◽  
Wide Band ◽  
Atomic Layer ◽  
Antireflection Coatings ◽  
Layer Deposition

Atomic layer deposition of Al_2O_3 and TiO_2 multilayers for applications as bandpass filters and antireflection coatings

2009 ◽  
Vol 48 (9) ◽  
pp. 1727 ◽  
Author(s):  
Adriana Szeghalmi ◽  
Michael Helgert ◽  
Robert Brunner ◽  
Frank Heyroth ◽  
Ulrich Gösele ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Bandpass Filters ◽  
Antireflection Coatings ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document