Superior Robust Ultrathin Single-Crystalline Silicon Carbide Membrane as a Versatile Platform for Biological Applications

2017 ◽  
Vol 9 (48) ◽  
pp. 41641-41647 ◽  
Author(s):  
Tuan-Khoa Nguyen ◽  
Hoang-Phuong Phan ◽  
Harshad Kamble ◽  
Raja Vadivelu ◽  
Toan Dinh ◽  
...  
2020 ◽  
Vol 101 ◽  
pp. 107625
Author(s):  
Debarati Mukherjee ◽  
Filipe Oliveira ◽  
Simone Camargo Trippe ◽  
Shlomo Rotter ◽  
Miguel Neto ◽  
...  

2008 ◽  
Vol 113 (3) ◽  
pp. 856-861 ◽  
Author(s):  
Zhenhai Wang ◽  
Mingwen Zhao ◽  
Tao He ◽  
Xuejuan Zhang ◽  
Zexiao Xi ◽  
...  

RSC Advances ◽  
2018 ◽  
Vol 8 (28) ◽  
pp. 15310-15314 ◽  
Author(s):  
Abu Riduan Md Foisal ◽  
Hoang-Phuong Phan ◽  
Toan Dinh ◽  
Tuan-Khoa Nguyen ◽  
Nam-Trung Nguyen ◽  
...  

This paper presents a simple, rapid and cost-effective wire bonding technique for single crystalline silicon carbide (3C–SiC) MEMS devices.


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